JPS5323584A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5323584A
JPS5323584A JP9788876A JP9788876A JPS5323584A JP S5323584 A JPS5323584 A JP S5323584A JP 9788876 A JP9788876 A JP 9788876A JP 9788876 A JP9788876 A JP 9788876A JP S5323584 A JPS5323584 A JP S5323584A
Authority
JP
Japan
Prior art keywords
film
production
semiconductor device
inhibit
decrease
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9788876A
Other languages
Japanese (ja)
Inventor
Masaru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9788876A priority Critical patent/JPS5323584A/en
Publication of JPS5323584A publication Critical patent/JPS5323584A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To inhibit the decrease in the thickness of an Al film at the time of anodization treatment of the Al film and subsequent selective etching treatment of the Al2O3 film and improve bonding characteristics by selectively providing Si3N4 of good adhesiveness to the Al film to said film.
COPYRIGHT: (C)1978,JPO&Japio
JP9788876A 1976-08-17 1976-08-17 Production of semiconductor device Pending JPS5323584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9788876A JPS5323584A (en) 1976-08-17 1976-08-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9788876A JPS5323584A (en) 1976-08-17 1976-08-17 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5323584A true JPS5323584A (en) 1978-03-04

Family

ID=14204278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9788876A Pending JPS5323584A (en) 1976-08-17 1976-08-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5323584A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPH07211690A (en) * 1994-01-12 1995-08-11 Lg Semicon Co Ltd Selective etching method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPS6337517B2 (en) * 1979-08-29 1988-07-26 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPH07211690A (en) * 1994-01-12 1995-08-11 Lg Semicon Co Ltd Selective etching method

Similar Documents

Publication Publication Date Title
JPS5351970A (en) Manufacture for semiconductor substrate
JPS5338278A (en) Semiconductor device
JPS5323584A (en) Production of semiconductor device
JPS5383467A (en) Production of semiconductor device
JPS5357773A (en) Semiconductor device
JPS543473A (en) Manufacture of semiconductor device
JPS52131462A (en) Manufacture of semiconductor device
JPS51123073A (en) Insulated gate (type) semiconductor device
JPS5245270A (en) Semiconductor device
JPS5436182A (en) Manufacture for semiconductor device
JPS51145267A (en) Manufacture of semiconductor device
JPS52119192A (en) Semiconductor
JPS5268388A (en) Semiconductor integrated circuit
JPS5252370A (en) Fabrication of glass-sealed semiconductor device
JPS546782A (en) Semiconductor device and its manufacture
JPS5223281A (en) Method of manufacturing semiconductor device
JPS5269266A (en) Production of semiconductor device
JPS547867A (en) Manufacture for semiconductor device
JPS52179A (en) Method of fabricating semiconductor
JPS52153676A (en) Production of semiconductor device
JPS52119067A (en) Semiconductor device
JPS5251872A (en) Production of semiconductor device
JPS5269649A (en) Semiconductor distortion element
JPS5269561A (en) Electrode of semiconductor device
JPS5297668A (en) Production of semiconductor device