JPS5354972A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5354972A
JPS5354972A JP13066376A JP13066376A JPS5354972A JP S5354972 A JPS5354972 A JP S5354972A JP 13066376 A JP13066376 A JP 13066376A JP 13066376 A JP13066376 A JP 13066376A JP S5354972 A JPS5354972 A JP S5354972A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
semiconductoe
atmosphere
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13066376A
Other languages
Japanese (ja)
Inventor
Teruo Sakurai
Kazuo Nanbu
Yasuo Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13066376A priority Critical patent/JPS5354972A/en
Publication of JPS5354972A publication Critical patent/JPS5354972A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce a thin and uniform thermal oxide film on a compound semiconductoe by treating a GaAs substrate at 550 to 600°C in an atmosphere of O2 or mixed gas of OW and inert gas.
COPYRIGHT: (C)1978,JPO&Japio
JP13066376A 1976-10-29 1976-10-29 Production of semiconductor device Pending JPS5354972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13066376A JPS5354972A (en) 1976-10-29 1976-10-29 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13066376A JPS5354972A (en) 1976-10-29 1976-10-29 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5354972A true JPS5354972A (en) 1978-05-18

Family

ID=15039625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13066376A Pending JPS5354972A (en) 1976-10-29 1976-10-29 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5354972A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0492415A (en) * 1990-08-07 1992-03-25 Sumitomo Electric Ind Ltd Gaas wafer and manufacture thereof, and ion implantation to gaas wafer
JP2013165262A (en) * 2012-01-13 2013-08-22 Sumitomo Electric Ind Ltd Optical semiconductor element manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0492415A (en) * 1990-08-07 1992-03-25 Sumitomo Electric Ind Ltd Gaas wafer and manufacture thereof, and ion implantation to gaas wafer
JP2013165262A (en) * 2012-01-13 2013-08-22 Sumitomo Electric Ind Ltd Optical semiconductor element manufacturing method

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