JPS52141573A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52141573A JPS52141573A JP5865276A JP5865276A JPS52141573A JP S52141573 A JPS52141573 A JP S52141573A JP 5865276 A JP5865276 A JP 5865276A JP 5865276 A JP5865276 A JP 5865276A JP S52141573 A JPS52141573 A JP S52141573A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- oxide layer
- diffusing
- added oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To form easily the narrow and thin diffusing region by laminating the As-added oxide layer on the B-added oxide layer through the nitride film and diffusing it in the oxygen atmosphere without trouble.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5865276A JPS52141573A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5865276A JPS52141573A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52141573A true JPS52141573A (en) | 1977-11-25 |
Family
ID=13090505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5865276A Pending JPS52141573A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141573A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS561568A (en) * | 1979-06-19 | 1981-01-09 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS58155764A (en) * | 1982-03-10 | 1983-09-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS58206158A (en) * | 1982-05-27 | 1983-12-01 | Toshiba Corp | Manufacture of semiconductor device |
-
1976
- 1976-05-20 JP JP5865276A patent/JPS52141573A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS561568A (en) * | 1979-06-19 | 1981-01-09 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS58155764A (en) * | 1982-03-10 | 1983-09-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS58206158A (en) * | 1982-05-27 | 1983-12-01 | Toshiba Corp | Manufacture of semiconductor device |
JPH0155585B2 (en) * | 1982-05-27 | 1989-11-27 | Tokyo Shibaura Electric Co |
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