JPS52141573A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52141573A
JPS52141573A JP5865276A JP5865276A JPS52141573A JP S52141573 A JPS52141573 A JP S52141573A JP 5865276 A JP5865276 A JP 5865276A JP 5865276 A JP5865276 A JP 5865276A JP S52141573 A JPS52141573 A JP S52141573A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
oxide layer
diffusing
added oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5865276A
Other languages
Japanese (ja)
Inventor
Tsutomu Fujita
Toyoki Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5865276A priority Critical patent/JPS52141573A/en
Publication of JPS52141573A publication Critical patent/JPS52141573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To form easily the narrow and thin diffusing region by laminating the As-added oxide layer on the B-added oxide layer through the nitride film and diffusing it in the oxygen atmosphere without trouble.
COPYRIGHT: (C)1977,JPO&Japio
JP5865276A 1976-05-20 1976-05-20 Manufacture of semiconductor device Pending JPS52141573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5865276A JPS52141573A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5865276A JPS52141573A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52141573A true JPS52141573A (en) 1977-11-25

Family

ID=13090505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5865276A Pending JPS52141573A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52141573A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561568A (en) * 1979-06-19 1981-01-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58155764A (en) * 1982-03-10 1983-09-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPS58206158A (en) * 1982-05-27 1983-12-01 Toshiba Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561568A (en) * 1979-06-19 1981-01-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58155764A (en) * 1982-03-10 1983-09-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPS58206158A (en) * 1982-05-27 1983-12-01 Toshiba Corp Manufacture of semiconductor device
JPH0155585B2 (en) * 1982-05-27 1989-11-27 Tokyo Shibaura Electric Co

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