JPS5354973A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5354973A
JPS5354973A JP13074976A JP13074976A JPS5354973A JP S5354973 A JPS5354973 A JP S5354973A JP 13074976 A JP13074976 A JP 13074976A JP 13074976 A JP13074976 A JP 13074976A JP S5354973 A JPS5354973 A JP S5354973A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
oxide film
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13074976A
Other languages
Japanese (ja)
Inventor
Tatsunori Nakajima
Kosei Kajiwara
Kazutoshi Nagano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13074976A priority Critical patent/JPS5354973A/en
Publication of JPS5354973A publication Critical patent/JPS5354973A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To form arbitrary stepping in porous oxide film surface with respect to substrate surface by growing an oxide film on the substrate side through the porous layer selectively formed on the substrate and making use of its volume expansion.
COPYRIGHT: (C)1978,JPO&Japio
JP13074976A 1976-10-29 1976-10-29 Semiconductor device and its production Pending JPS5354973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13074976A JPS5354973A (en) 1976-10-29 1976-10-29 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13074976A JPS5354973A (en) 1976-10-29 1976-10-29 Semiconductor device and its production

Publications (1)

Publication Number Publication Date
JPS5354973A true JPS5354973A (en) 1978-05-18

Family

ID=15041708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13074976A Pending JPS5354973A (en) 1976-10-29 1976-10-29 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS5354973A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283131A (en) * 1985-06-10 1986-12-13 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283131A (en) * 1985-06-10 1986-12-13 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit substrate

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