JPS5255860A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5255860A
JPS5255860A JP13143075A JP13143075A JPS5255860A JP S5255860 A JPS5255860 A JP S5255860A JP 13143075 A JP13143075 A JP 13143075A JP 13143075 A JP13143075 A JP 13143075A JP S5255860 A JPS5255860 A JP S5255860A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
selective diffusion
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13143075A
Other languages
Japanese (ja)
Inventor
Tadashi Kirihaku
Takeshi Fukuda
Yoshito Ichinose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13143075A priority Critical patent/JPS5255860A/en
Publication of JPS5255860A publication Critical patent/JPS5255860A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To facilitate selective diffusion of As by using double layers of an SiO2 film and polycrystalline Si film as a mask material in the selective diffusion of As.
COPYRIGHT: (C)1977,JPO&Japio
JP13143075A 1975-11-04 1975-11-04 Production of semiconductor device Pending JPS5255860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13143075A JPS5255860A (en) 1975-11-04 1975-11-04 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13143075A JPS5255860A (en) 1975-11-04 1975-11-04 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5255860A true JPS5255860A (en) 1977-05-07

Family

ID=15057766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13143075A Pending JPS5255860A (en) 1975-11-04 1975-11-04 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5255860A (en)

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