JPS5311573A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5311573A JPS5311573A JP8613276A JP8613276A JPS5311573A JP S5311573 A JPS5311573 A JP S5311573A JP 8613276 A JP8613276 A JP 8613276A JP 8613276 A JP8613276 A JP 8613276A JP S5311573 A JPS5311573 A JP S5311573A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- patterning
- diffuse
- restricted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve masking effect for As and diffuse As at a high concentration at the time of forming buried layers by making ]iO2 film sufficiently thick without being restricted by patterning.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8613276A JPS5311573A (en) | 1976-07-19 | 1976-07-19 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8613276A JPS5311573A (en) | 1976-07-19 | 1976-07-19 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5311573A true JPS5311573A (en) | 1978-02-02 |
JPS5412385B2 JPS5412385B2 (en) | 1979-05-22 |
Family
ID=13878171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8613276A Granted JPS5311573A (en) | 1976-07-19 | 1976-07-19 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5311573A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60202060A (en) * | 1984-03-26 | 1985-10-12 | Sanyu Boki Seisakusho:Kk | Winding tension adjusting device for roving machine |
-
1976
- 1976-07-19 JP JP8613276A patent/JPS5311573A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60202060A (en) * | 1984-03-26 | 1985-10-12 | Sanyu Boki Seisakusho:Kk | Winding tension adjusting device for roving machine |
Also Published As
Publication number | Publication date |
---|---|
JPS5412385B2 (en) | 1979-05-22 |
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