JPS5311573A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5311573A
JPS5311573A JP8613276A JP8613276A JPS5311573A JP S5311573 A JPS5311573 A JP S5311573A JP 8613276 A JP8613276 A JP 8613276A JP 8613276 A JP8613276 A JP 8613276A JP S5311573 A JPS5311573 A JP S5311573A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
patterning
diffuse
restricted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8613276A
Other languages
Japanese (ja)
Other versions
JPS5412385B2 (en
Inventor
Hideyuki Uemura
Toshio Masuda
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8613276A priority Critical patent/JPS5311573A/en
Publication of JPS5311573A publication Critical patent/JPS5311573A/en
Publication of JPS5412385B2 publication Critical patent/JPS5412385B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To improve masking effect for As and diffuse As at a high concentration at the time of forming buried layers by making ]iO2 film sufficiently thick without being restricted by patterning.
COPYRIGHT: (C)1978,JPO&Japio
JP8613276A 1976-07-19 1976-07-19 Production of semiconductor device Granted JPS5311573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8613276A JPS5311573A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8613276A JPS5311573A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5311573A true JPS5311573A (en) 1978-02-02
JPS5412385B2 JPS5412385B2 (en) 1979-05-22

Family

ID=13878171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8613276A Granted JPS5311573A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5311573A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60202060A (en) * 1984-03-26 1985-10-12 Sanyu Boki Seisakusho:Kk Winding tension adjusting device for roving machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60202060A (en) * 1984-03-26 1985-10-12 Sanyu Boki Seisakusho:Kk Winding tension adjusting device for roving machine

Also Published As

Publication number Publication date
JPS5412385B2 (en) 1979-05-22

Similar Documents

Publication Publication Date Title
JPS53119686A (en) Production of semiconductor device
JPS5253673A (en) Device and production for semiconductor
JPS5311573A (en) Production of semiconductor device
JPS5324290A (en) Semiconductor device
JPS5277670A (en) Semiconductive device
JPS5348458A (en) Production of semiconductor device
JPS52123879A (en) Mos type semiconductor device and its production
JPS52113176A (en) Semiconductor device
JPS53123678A (en) Manufacture of field effect semiconductor device of insulation gate type
JPS5377168A (en) Production of semiconductor device
JPS53147487A (en) Semiconductor device
JPS51120677A (en) Semiconductor device manufacturing method
JPS51112266A (en) Semiconductor device production method
JPS535580A (en) Field effect type semiconductor device
JPS52126167A (en) Formation of electrode for semiconductor device
JPS5255860A (en) Production of semiconductor device
JPS5310970A (en) Production of semiconductor device
JPS5361968A (en) Production of semiconductor device
JPS5376745A (en) Production of semiconductor device
JPS53116782A (en) Production of semiconductor device
JPS5384691A (en) Production of semiconductor device
JPS5348491A (en) Production of semiconductor device
JPS5326681A (en) Manufact ure of semiconductor device
JPS5357780A (en) Production of semiconductor device
JPS5418670A (en) Manufacture of semiconductor device