JPS52126167A - Formation of electrode for semiconductor device - Google Patents
Formation of electrode for semiconductor deviceInfo
- Publication number
- JPS52126167A JPS52126167A JP4297776A JP4297776A JPS52126167A JP S52126167 A JPS52126167 A JP S52126167A JP 4297776 A JP4297776 A JP 4297776A JP 4297776 A JP4297776 A JP 4297776A JP S52126167 A JPS52126167 A JP S52126167A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- formation
- semiconductor device
- lift
- reliable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To easily form a reliable and cheap layer-built electrode by a lift-off effect.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4297776A JPS52126167A (en) | 1976-04-15 | 1976-04-15 | Formation of electrode for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4297776A JPS52126167A (en) | 1976-04-15 | 1976-04-15 | Formation of electrode for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52126167A true JPS52126167A (en) | 1977-10-22 |
Family
ID=12651089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4297776A Pending JPS52126167A (en) | 1976-04-15 | 1976-04-15 | Formation of electrode for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52126167A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001035854A (en) * | 1999-05-17 | 2001-02-09 | Denso Corp | Method for formation of film and electrode or wiring |
JP2001313295A (en) * | 2000-04-28 | 2001-11-09 | Denso Corp | Method of forming pattern |
-
1976
- 1976-04-15 JP JP4297776A patent/JPS52126167A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001035854A (en) * | 1999-05-17 | 2001-02-09 | Denso Corp | Method for formation of film and electrode or wiring |
JP2001313295A (en) * | 2000-04-28 | 2001-11-09 | Denso Corp | Method of forming pattern |
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