JPS52126167A - Formation of electrode for semiconductor device - Google Patents

Formation of electrode for semiconductor device

Info

Publication number
JPS52126167A
JPS52126167A JP4297776A JP4297776A JPS52126167A JP S52126167 A JPS52126167 A JP S52126167A JP 4297776 A JP4297776 A JP 4297776A JP 4297776 A JP4297776 A JP 4297776A JP S52126167 A JPS52126167 A JP S52126167A
Authority
JP
Japan
Prior art keywords
electrode
formation
semiconductor device
lift
reliable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4297776A
Other languages
Japanese (ja)
Inventor
Yasumichi Yasuda
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4297776A priority Critical patent/JPS52126167A/en
Publication of JPS52126167A publication Critical patent/JPS52126167A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To easily form a reliable and cheap layer-built electrode by a lift-off effect.
COPYRIGHT: (C)1977,JPO&Japio
JP4297776A 1976-04-15 1976-04-15 Formation of electrode for semiconductor device Pending JPS52126167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4297776A JPS52126167A (en) 1976-04-15 1976-04-15 Formation of electrode for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4297776A JPS52126167A (en) 1976-04-15 1976-04-15 Formation of electrode for semiconductor device

Publications (1)

Publication Number Publication Date
JPS52126167A true JPS52126167A (en) 1977-10-22

Family

ID=12651089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4297776A Pending JPS52126167A (en) 1976-04-15 1976-04-15 Formation of electrode for semiconductor device

Country Status (1)

Country Link
JP (1) JPS52126167A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035854A (en) * 1999-05-17 2001-02-09 Denso Corp Method for formation of film and electrode or wiring
JP2001313295A (en) * 2000-04-28 2001-11-09 Denso Corp Method of forming pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035854A (en) * 1999-05-17 2001-02-09 Denso Corp Method for formation of film and electrode or wiring
JP2001313295A (en) * 2000-04-28 2001-11-09 Denso Corp Method of forming pattern

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