JPS52149975A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52149975A JPS52149975A JP6643676A JP6643676A JPS52149975A JP S52149975 A JPS52149975 A JP S52149975A JP 6643676 A JP6643676 A JP 6643676A JP 6643676 A JP6643676 A JP 6643676A JP S52149975 A JPS52149975 A JP S52149975A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- strong
- protection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To perform surface stabilization and protection with the composite films of a mechanically strong PSG film and a chemically strong Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6643676A JPS52149975A (en) | 1976-06-09 | 1976-06-09 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6643676A JPS52149975A (en) | 1976-06-09 | 1976-06-09 | Production of semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59000903A Division JPS59130430A (en) | 1984-01-09 | 1984-01-09 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52149975A true JPS52149975A (en) | 1977-12-13 |
Family
ID=13315716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6643676A Pending JPS52149975A (en) | 1976-06-09 | 1976-06-09 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52149975A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5762535A (en) * | 1980-10-01 | 1982-04-15 | Hitachi Ltd | Semiconductor device |
US4668973A (en) * | 1978-06-19 | 1987-05-26 | Rca Corporation | Semiconductor device passivated with phosphosilicate glass over silicon nitride |
-
1976
- 1976-06-09 JP JP6643676A patent/JPS52149975A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4668973A (en) * | 1978-06-19 | 1987-05-26 | Rca Corporation | Semiconductor device passivated with phosphosilicate glass over silicon nitride |
JPS5762535A (en) * | 1980-10-01 | 1982-04-15 | Hitachi Ltd | Semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5351970A (en) | Manufacture for semiconductor substrate | |
JPS5338278A (en) | Semiconductor device | |
JPS5365066A (en) | Semiconductor device | |
JPS52149975A (en) | Production of semiconductor device | |
JPS5214387A (en) | Semiconductor device | |
JPS52128063A (en) | Manufacture of semiconductor device | |
JPS53101979A (en) | Semiconductor device | |
JPS52129380A (en) | Semiconductor device | |
JPS5352359A (en) | Resin mold type semiconductor device | |
JPS5351965A (en) | Semiconductor unit | |
JPS52131462A (en) | Manufacture of semiconductor device | |
JPS5436182A (en) | Manufacture for semiconductor device | |
JPS5345174A (en) | Moisture resistant semiconductor device | |
JPS5325363A (en) | Semiconductor element | |
JPS51125698A (en) | The formation of silicon dioxide film | |
JPS5321568A (en) | Production of semiconductor device | |
JPS5321569A (en) | Production of semiconductor device | |
JPS5376A (en) | Manufacture of semiconductor device | |
JPS52116085A (en) | Air-space semiconductor integrated circuit | |
JPS5350241A (en) | Electrodeposit coating | |
JPS5260581A (en) | Semiconductor device | |
JPS52119864A (en) | Manufacture of semi-conductor device | |
JPS53117972A (en) | Semiconductor device | |
JPS5353964A (en) | Electrode forming method of semiconductor device | |
JPS5384712A (en) | Photographic material |