JPS52149975A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52149975A
JPS52149975A JP6643676A JP6643676A JPS52149975A JP S52149975 A JPS52149975 A JP S52149975A JP 6643676 A JP6643676 A JP 6643676A JP 6643676 A JP6643676 A JP 6643676A JP S52149975 A JPS52149975 A JP S52149975A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
strong
protection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6643676A
Other languages
Japanese (ja)
Inventor
Shiro Hagiwara
Hiroo Mizogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6643676A priority Critical patent/JPS52149975A/en
Publication of JPS52149975A publication Critical patent/JPS52149975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To perform surface stabilization and protection with the composite films of a mechanically strong PSG film and a chemically strong Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
JP6643676A 1976-06-09 1976-06-09 Production of semiconductor device Pending JPS52149975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6643676A JPS52149975A (en) 1976-06-09 1976-06-09 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6643676A JPS52149975A (en) 1976-06-09 1976-06-09 Production of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59000903A Division JPS59130430A (en) 1984-01-09 1984-01-09 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS52149975A true JPS52149975A (en) 1977-12-13

Family

ID=13315716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6643676A Pending JPS52149975A (en) 1976-06-09 1976-06-09 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52149975A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762535A (en) * 1980-10-01 1982-04-15 Hitachi Ltd Semiconductor device
US4668973A (en) * 1978-06-19 1987-05-26 Rca Corporation Semiconductor device passivated with phosphosilicate glass over silicon nitride

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668973A (en) * 1978-06-19 1987-05-26 Rca Corporation Semiconductor device passivated with phosphosilicate glass over silicon nitride
JPS5762535A (en) * 1980-10-01 1982-04-15 Hitachi Ltd Semiconductor device

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