JPS52116085A - Air-space semiconductor integrated circuit - Google Patents
Air-space semiconductor integrated circuitInfo
- Publication number
- JPS52116085A JPS52116085A JP3252276A JP3252276A JPS52116085A JP S52116085 A JPS52116085 A JP S52116085A JP 3252276 A JP3252276 A JP 3252276A JP 3252276 A JP3252276 A JP 3252276A JP S52116085 A JPS52116085 A JP S52116085A
- Authority
- JP
- Japan
- Prior art keywords
- air
- integrated circuit
- semiconductor integrated
- space
- space semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To avoid contamination and occurrence of unnecessary channels by protecting the side and rear surface of each semiconductor zone with a composite dielectric material comprising a semiinsulating film and a high-insulating film to form an air-space semiconductor IC circuit.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3252276A JPS52116085A (en) | 1976-03-26 | 1976-03-26 | Air-space semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3252276A JPS52116085A (en) | 1976-03-26 | 1976-03-26 | Air-space semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52116085A true JPS52116085A (en) | 1977-09-29 |
Family
ID=12361280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3252276A Pending JPS52116085A (en) | 1976-03-26 | 1976-03-26 | Air-space semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52116085A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01154559A (en) * | 1987-10-29 | 1989-06-16 | Tektronix Inc | Integrated circuit and its manufacture |
JPH0267737A (en) * | 1988-07-19 | 1990-03-07 | Tektronix Inc | Integrated circuit and its manufactrue |
-
1976
- 1976-03-26 JP JP3252276A patent/JPS52116085A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01154559A (en) * | 1987-10-29 | 1989-06-16 | Tektronix Inc | Integrated circuit and its manufacture |
JPH0267737A (en) * | 1988-07-19 | 1990-03-07 | Tektronix Inc | Integrated circuit and its manufactrue |
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