JPS52116085A - Air-space semiconductor integrated circuit - Google Patents

Air-space semiconductor integrated circuit

Info

Publication number
JPS52116085A
JPS52116085A JP3252276A JP3252276A JPS52116085A JP S52116085 A JPS52116085 A JP S52116085A JP 3252276 A JP3252276 A JP 3252276A JP 3252276 A JP3252276 A JP 3252276A JP S52116085 A JPS52116085 A JP S52116085A
Authority
JP
Japan
Prior art keywords
air
integrated circuit
semiconductor integrated
space
space semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3252276A
Other languages
Japanese (ja)
Inventor
Shinji Okuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3252276A priority Critical patent/JPS52116085A/en
Publication of JPS52116085A publication Critical patent/JPS52116085A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To avoid contamination and occurrence of unnecessary channels by protecting the side and rear surface of each semiconductor zone with a composite dielectric material comprising a semiinsulating film and a high-insulating film to form an air-space semiconductor IC circuit.
COPYRIGHT: (C)1977,JPO&Japio
JP3252276A 1976-03-26 1976-03-26 Air-space semiconductor integrated circuit Pending JPS52116085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3252276A JPS52116085A (en) 1976-03-26 1976-03-26 Air-space semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3252276A JPS52116085A (en) 1976-03-26 1976-03-26 Air-space semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS52116085A true JPS52116085A (en) 1977-09-29

Family

ID=12361280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3252276A Pending JPS52116085A (en) 1976-03-26 1976-03-26 Air-space semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52116085A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154559A (en) * 1987-10-29 1989-06-16 Tektronix Inc Integrated circuit and its manufacture
JPH0267737A (en) * 1988-07-19 1990-03-07 Tektronix Inc Integrated circuit and its manufactrue

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154559A (en) * 1987-10-29 1989-06-16 Tektronix Inc Integrated circuit and its manufacture
JPH0267737A (en) * 1988-07-19 1990-03-07 Tektronix Inc Integrated circuit and its manufactrue

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