JPS524789A - Semiconductor equipment - Google Patents

Semiconductor equipment

Info

Publication number
JPS524789A
JPS524789A JP8117775A JP8117775A JPS524789A JP S524789 A JPS524789 A JP S524789A JP 8117775 A JP8117775 A JP 8117775A JP 8117775 A JP8117775 A JP 8117775A JP S524789 A JPS524789 A JP S524789A
Authority
JP
Japan
Prior art keywords
semiconductor equipment
revent
mis
fet
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8117775A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Kazuo Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8117775A priority Critical patent/JPS524789A/en
Publication of JPS524789A publication Critical patent/JPS524789A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To revent contamination of gate insulation film by forming poly-crystal Si-film under Al electrode and thus improving MIS-FET.
COPYRIGHT: (C)1977,JPO&Japio
JP8117775A 1975-06-30 1975-06-30 Semiconductor equipment Pending JPS524789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8117775A JPS524789A (en) 1975-06-30 1975-06-30 Semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8117775A JPS524789A (en) 1975-06-30 1975-06-30 Semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS524789A true JPS524789A (en) 1977-01-14

Family

ID=13739171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8117775A Pending JPS524789A (en) 1975-06-30 1975-06-30 Semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS524789A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162974A (en) * 1978-06-15 1979-12-25 Sony Corp Insulated gate type semiconductor device
JPS5975091A (en) * 1982-10-19 1984-04-27 株式会社日立製作所 Clothing dryer
JP2007503117A (en) * 2003-08-18 2007-02-15 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド Field effect transistor with increased carrier mobility

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162974A (en) * 1978-06-15 1979-12-25 Sony Corp Insulated gate type semiconductor device
JPS5975091A (en) * 1982-10-19 1984-04-27 株式会社日立製作所 Clothing dryer
JPS639479B2 (en) * 1982-10-19 1988-02-29 Hitachi Ltd
JP2007503117A (en) * 2003-08-18 2007-02-15 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド Field effect transistor with increased carrier mobility
US7923785B2 (en) 2003-08-18 2011-04-12 Globalfoundries Inc. Field effect transistor having increased carrier mobility

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