JPS53111283A - Compound semiconductor device and production of the same - Google Patents

Compound semiconductor device and production of the same

Info

Publication number
JPS53111283A
JPS53111283A JP2653177A JP2653177A JPS53111283A JP S53111283 A JPS53111283 A JP S53111283A JP 2653177 A JP2653177 A JP 2653177A JP 2653177 A JP2653177 A JP 2653177A JP S53111283 A JPS53111283 A JP S53111283A
Authority
JP
Japan
Prior art keywords
production
same
semiconductor device
compound semiconductor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2653177A
Other languages
Japanese (ja)
Other versions
JPS6040716B2 (en
Inventor
Hiromitsu Takagi
Kota Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2653177A priority Critical patent/JPS6040716B2/en
Publication of JPS53111283A publication Critical patent/JPS53111283A/en
Publication of JPS6040716B2 publication Critical patent/JPS6040716B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To produce an insulated gate FET (MOST) of a short gate length suitable for high frequency responding by using a group III-V semiconductor.
COPYRIGHT: (C)1978,JPO&Japio
JP2653177A 1977-03-09 1977-03-09 Compound semiconductor device and its manufacturing method Expired JPS6040716B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2653177A JPS6040716B2 (en) 1977-03-09 1977-03-09 Compound semiconductor device and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2653177A JPS6040716B2 (en) 1977-03-09 1977-03-09 Compound semiconductor device and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS53111283A true JPS53111283A (en) 1978-09-28
JPS6040716B2 JPS6040716B2 (en) 1985-09-12

Family

ID=12196057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2653177A Expired JPS6040716B2 (en) 1977-03-09 1977-03-09 Compound semiconductor device and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS6040716B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586167A (en) * 1978-12-23 1980-06-28 Nippon Telegr & Teleph Corp <Ntt> Mos diode
JPS5676569A (en) * 1979-11-27 1981-06-24 Sumitomo Electric Ind Ltd Semiconductor device and manufacture thereof
JPS5676571A (en) * 1979-11-28 1981-06-24 Sumitomo Electric Ind Ltd Mos field effect transistor and manufacture thereof
JPS5768073A (en) * 1980-10-14 1982-04-26 Nec Corp Field effect transistor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632558U (en) * 1992-04-03 1994-04-28 株式会社小向建装 Bonding structure of plates

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586167A (en) * 1978-12-23 1980-06-28 Nippon Telegr & Teleph Corp <Ntt> Mos diode
JPS5676569A (en) * 1979-11-27 1981-06-24 Sumitomo Electric Ind Ltd Semiconductor device and manufacture thereof
JPS5676571A (en) * 1979-11-28 1981-06-24 Sumitomo Electric Ind Ltd Mos field effect transistor and manufacture thereof
JPS5768073A (en) * 1980-10-14 1982-04-26 Nec Corp Field effect transistor
JPH023540B2 (en) * 1980-10-14 1990-01-24 Nippon Electric Co

Also Published As

Publication number Publication date
JPS6040716B2 (en) 1985-09-12

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