JPS5378177A - Field effect transistor - Google Patents

Field effect transistor

Info

Publication number
JPS5378177A
JPS5378177A JP15335476A JP15335476A JPS5378177A JP S5378177 A JPS5378177 A JP S5378177A JP 15335476 A JP15335476 A JP 15335476A JP 15335476 A JP15335476 A JP 15335476A JP S5378177 A JPS5378177 A JP S5378177A
Authority
JP
Japan
Prior art keywords
field effect
effect transistor
gate
anisotropy
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15335476A
Other languages
Japanese (ja)
Other versions
JPS5742231B2 (en
Inventor
Kiyoshi Aoki
Susumu Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15335476A priority Critical patent/JPS5378177A/en
Publication of JPS5378177A publication Critical patent/JPS5378177A/en
Publication of JPS5742231B2 publication Critical patent/JPS5742231B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain FET with the high source-gate strength though the gate gap is small by anisotropy-etching a GaAs substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15335476A 1976-12-22 1976-12-22 Field effect transistor Granted JPS5378177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15335476A JPS5378177A (en) 1976-12-22 1976-12-22 Field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15335476A JPS5378177A (en) 1976-12-22 1976-12-22 Field effect transistor

Publications (2)

Publication Number Publication Date
JPS5378177A true JPS5378177A (en) 1978-07-11
JPS5742231B2 JPS5742231B2 (en) 1982-09-07

Family

ID=15560618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15335476A Granted JPS5378177A (en) 1976-12-22 1976-12-22 Field effect transistor

Country Status (1)

Country Link
JP (1) JPS5378177A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654075A (en) * 1979-07-27 1981-05-13 Gen Electric High frequency field effect transistor and method of manufacturing same
US4447904A (en) * 1981-02-04 1984-05-08 Xerox Corporation Semiconductor devices with nonplanar characteristics produced in chemical vapor deposition
WO2001048809A1 (en) * 1999-12-24 2001-07-05 Sumitomo Electric Industries, Ltd. Junction field-effect transistor and method of manufacture thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027992A (en) * 1973-07-17 1975-03-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027992A (en) * 1973-07-17 1975-03-22

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654075A (en) * 1979-07-27 1981-05-13 Gen Electric High frequency field effect transistor and method of manufacturing same
US4447904A (en) * 1981-02-04 1984-05-08 Xerox Corporation Semiconductor devices with nonplanar characteristics produced in chemical vapor deposition
WO2001048809A1 (en) * 1999-12-24 2001-07-05 Sumitomo Electric Industries, Ltd. Junction field-effect transistor and method of manufacture thereof
US6870189B1 (en) 1999-12-24 2005-03-22 Sumitomo Electric Industries, Ltd. Pinch-off type vertical junction field effect transistor and method of manufacturing the same

Also Published As

Publication number Publication date
JPS5742231B2 (en) 1982-09-07

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