JPS53147469A - Vertical field effect transistor and production of the same - Google Patents
Vertical field effect transistor and production of the sameInfo
- Publication number
- JPS53147469A JPS53147469A JP6179177A JP6179177A JPS53147469A JP S53147469 A JPS53147469 A JP S53147469A JP 6179177 A JP6179177 A JP 6179177A JP 6179177 A JP6179177 A JP 6179177A JP S53147469 A JPS53147469 A JP S53147469A
- Authority
- JP
- Japan
- Prior art keywords
- production
- same
- field effect
- effect transistor
- vertical field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To porduce FET of small gate input capacity by opening holes in the insulating film on the the sloped surfaces of the B-grooves formed in a substrate, and diffusion-forming gate regions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6179177A JPS53147469A (en) | 1977-05-27 | 1977-05-27 | Vertical field effect transistor and production of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6179177A JPS53147469A (en) | 1977-05-27 | 1977-05-27 | Vertical field effect transistor and production of the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53147469A true JPS53147469A (en) | 1978-12-22 |
JPS5751272B2 JPS5751272B2 (en) | 1982-11-01 |
Family
ID=13181265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6179177A Granted JPS53147469A (en) | 1977-05-27 | 1977-05-27 | Vertical field effect transistor and production of the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53147469A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5650558A (en) * | 1979-10-01 | 1981-05-07 | Seiko Epson Corp | Complementary mos integrated circuit |
US4520552A (en) * | 1980-04-14 | 1985-06-04 | Thomson-Csf | Semiconductor device with deep grip accessible via the surface and process for manufacturing same |
JPH0251279A (en) * | 1988-08-15 | 1990-02-21 | Nec Corp | Vertical field effect transistor |
JPH02189979A (en) * | 1989-01-18 | 1990-07-25 | Mitsubishi Electric Corp | Static induction type switching element and manufacture thereof |
JPH06350104A (en) * | 1993-06-03 | 1994-12-22 | Tokin Corp | Electrostatic induction type semiconductor device |
US11094816B2 (en) | 2019-08-20 | 2021-08-17 | Kabushiki Kaisha Toshiba | Semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5132187A (en) * | 1974-09-11 | 1976-03-18 | Matsushita Electric Ind Co Ltd | Denkaikokatoranjisuta |
JPS5245281A (en) * | 1975-10-07 | 1977-04-09 | Matsushita Electric Ind Co Ltd | Field effect transistor of vertical junction type |
-
1977
- 1977-05-27 JP JP6179177A patent/JPS53147469A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5132187A (en) * | 1974-09-11 | 1976-03-18 | Matsushita Electric Ind Co Ltd | Denkaikokatoranjisuta |
JPS5245281A (en) * | 1975-10-07 | 1977-04-09 | Matsushita Electric Ind Co Ltd | Field effect transistor of vertical junction type |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5650558A (en) * | 1979-10-01 | 1981-05-07 | Seiko Epson Corp | Complementary mos integrated circuit |
JPS6253952B2 (en) * | 1979-10-01 | 1987-11-12 | Seiko Epson Corp | |
US4520552A (en) * | 1980-04-14 | 1985-06-04 | Thomson-Csf | Semiconductor device with deep grip accessible via the surface and process for manufacturing same |
JPH0251279A (en) * | 1988-08-15 | 1990-02-21 | Nec Corp | Vertical field effect transistor |
JPH02189979A (en) * | 1989-01-18 | 1990-07-25 | Mitsubishi Electric Corp | Static induction type switching element and manufacture thereof |
JPH06350104A (en) * | 1993-06-03 | 1994-12-22 | Tokin Corp | Electrostatic induction type semiconductor device |
US11094816B2 (en) | 2019-08-20 | 2021-08-17 | Kabushiki Kaisha Toshiba | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5751272B2 (en) | 1982-11-01 |
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