JPS539479A - Production of field effect transistors - Google Patents

Production of field effect transistors

Info

Publication number
JPS539479A
JPS539479A JP8287776A JP8287776A JPS539479A JP S539479 A JPS539479 A JP S539479A JP 8287776 A JP8287776 A JP 8287776A JP 8287776 A JP8287776 A JP 8287776A JP S539479 A JPS539479 A JP S539479A
Authority
JP
Japan
Prior art keywords
production
field effect
effect transistors
gate electrode
beforehand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8287776A
Other languages
Japanese (ja)
Inventor
Yutaka Hirano
Kiyobumi Oota
Yasuo Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8287776A priority Critical patent/JPS539479A/en
Publication of JPS539479A publication Critical patent/JPS539479A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a super-high frequency FET by beforehand patterning the relative positions of the length of gate electrode and gate electrode, source, drain regions simultaneously thereby accurately and finely setting these factors.
COPYRIGHT: (C)1978,JPO&Japio
JP8287776A 1976-07-14 1976-07-14 Production of field effect transistors Pending JPS539479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8287776A JPS539479A (en) 1976-07-14 1976-07-14 Production of field effect transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8287776A JPS539479A (en) 1976-07-14 1976-07-14 Production of field effect transistors

Publications (1)

Publication Number Publication Date
JPS539479A true JPS539479A (en) 1978-01-27

Family

ID=13786510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8287776A Pending JPS539479A (en) 1976-07-14 1976-07-14 Production of field effect transistors

Country Status (1)

Country Link
JP (1) JPS539479A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109744U (en) * 1980-01-25 1981-08-25
JPS56116049U (en) * 1980-02-04 1981-09-05
JPS5936344U (en) * 1982-09-01 1984-03-07 株式会社ほくさん Medical humidifier heating device
JPS6155968A (en) * 1984-08-28 1986-03-20 Toshiba Corp Manufacture of field-effect transistor
JPS6239076A (en) * 1985-08-14 1987-02-20 Nec Corp Manufacture of field effect transistor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109744U (en) * 1980-01-25 1981-08-25
JPS5826662Y2 (en) * 1980-01-25 1983-06-09 株式会社 ほくさん medical gas humidifier
JPS56116049U (en) * 1980-02-04 1981-09-05
JPS5820275Y2 (en) * 1980-02-04 1983-04-26 株式会社 ほくさん humidifier
JPS5936344U (en) * 1982-09-01 1984-03-07 株式会社ほくさん Medical humidifier heating device
JPS6155968A (en) * 1984-08-28 1986-03-20 Toshiba Corp Manufacture of field-effect transistor
JPS6239076A (en) * 1985-08-14 1987-02-20 Nec Corp Manufacture of field effect transistor

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