JPS539479A - Production of field effect transistors - Google Patents
Production of field effect transistorsInfo
- Publication number
- JPS539479A JPS539479A JP8287776A JP8287776A JPS539479A JP S539479 A JPS539479 A JP S539479A JP 8287776 A JP8287776 A JP 8287776A JP 8287776 A JP8287776 A JP 8287776A JP S539479 A JPS539479 A JP S539479A
- Authority
- JP
- Japan
- Prior art keywords
- production
- field effect
- effect transistors
- gate electrode
- beforehand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a super-high frequency FET by beforehand patterning the relative positions of the length of gate electrode and gate electrode, source, drain regions simultaneously thereby accurately and finely setting these factors.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8287776A JPS539479A (en) | 1976-07-14 | 1976-07-14 | Production of field effect transistors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8287776A JPS539479A (en) | 1976-07-14 | 1976-07-14 | Production of field effect transistors |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS539479A true JPS539479A (en) | 1978-01-27 |
Family
ID=13786510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8287776A Pending JPS539479A (en) | 1976-07-14 | 1976-07-14 | Production of field effect transistors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS539479A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56109744U (en) * | 1980-01-25 | 1981-08-25 | ||
JPS56116049U (en) * | 1980-02-04 | 1981-09-05 | ||
JPS5936344U (en) * | 1982-09-01 | 1984-03-07 | 株式会社ほくさん | Medical humidifier heating device |
JPS6155968A (en) * | 1984-08-28 | 1986-03-20 | Toshiba Corp | Manufacture of field-effect transistor |
JPS6239076A (en) * | 1985-08-14 | 1987-02-20 | Nec Corp | Manufacture of field effect transistor |
-
1976
- 1976-07-14 JP JP8287776A patent/JPS539479A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56109744U (en) * | 1980-01-25 | 1981-08-25 | ||
JPS5826662Y2 (en) * | 1980-01-25 | 1983-06-09 | 株式会社 ほくさん | medical gas humidifier |
JPS56116049U (en) * | 1980-02-04 | 1981-09-05 | ||
JPS5820275Y2 (en) * | 1980-02-04 | 1983-04-26 | 株式会社 ほくさん | humidifier |
JPS5936344U (en) * | 1982-09-01 | 1984-03-07 | 株式会社ほくさん | Medical humidifier heating device |
JPS6155968A (en) * | 1984-08-28 | 1986-03-20 | Toshiba Corp | Manufacture of field-effect transistor |
JPS6239076A (en) * | 1985-08-14 | 1987-02-20 | Nec Corp | Manufacture of field effect transistor |
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