JPS5421173A - Manufacture for semiconductor having oxide film - Google Patents

Manufacture for semiconductor having oxide film

Info

Publication number
JPS5421173A
JPS5421173A JP8576277A JP8576277A JPS5421173A JP S5421173 A JPS5421173 A JP S5421173A JP 8576277 A JP8576277 A JP 8576277A JP 8576277 A JP8576277 A JP 8576277A JP S5421173 A JPS5421173 A JP S5421173A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
oxide film
oxidation
antitrapezoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8576277A
Other languages
Japanese (ja)
Inventor
Kazuto Sakuma
Kohei Ebara
Kuniki Owada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8576277A priority Critical patent/JPS5421173A/en
Publication of JPS5421173A publication Critical patent/JPS5421173A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To from oxidation isolating film having flat surface, by forming selectively oxidation -proof mask at the side wall surface of the concave part of antitrapezoid shape formed on the substrate surface by etching.
COPYRIGHT: (C)1979,JPO&Japio
JP8576277A 1977-07-18 1977-07-18 Manufacture for semiconductor having oxide film Pending JPS5421173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8576277A JPS5421173A (en) 1977-07-18 1977-07-18 Manufacture for semiconductor having oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8576277A JPS5421173A (en) 1977-07-18 1977-07-18 Manufacture for semiconductor having oxide film

Publications (1)

Publication Number Publication Date
JPS5421173A true JPS5421173A (en) 1979-02-17

Family

ID=13867866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8576277A Pending JPS5421173A (en) 1977-07-18 1977-07-18 Manufacture for semiconductor having oxide film

Country Status (1)

Country Link
JP (1) JPS5421173A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643744A (en) * 1979-09-18 1981-04-22 Seiko Epson Corp Manufacture of semiconductor device
JPS5690541A (en) * 1979-12-21 1981-07-22 Nec Corp Production of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146187A (en) * 1975-06-11 1976-12-15 Hitachi Ltd Diode device fabrication method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146187A (en) * 1975-06-11 1976-12-15 Hitachi Ltd Diode device fabrication method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643744A (en) * 1979-09-18 1981-04-22 Seiko Epson Corp Manufacture of semiconductor device
JPS5690541A (en) * 1979-12-21 1981-07-22 Nec Corp Production of semiconductor device

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