JPS5421173A - Manufacture for semiconductor having oxide film - Google Patents
Manufacture for semiconductor having oxide filmInfo
- Publication number
- JPS5421173A JPS5421173A JP8576277A JP8576277A JPS5421173A JP S5421173 A JPS5421173 A JP S5421173A JP 8576277 A JP8576277 A JP 8576277A JP 8576277 A JP8576277 A JP 8576277A JP S5421173 A JPS5421173 A JP S5421173A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- oxide film
- oxidation
- antitrapezoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To from oxidation isolating film having flat surface, by forming selectively oxidation -proof mask at the side wall surface of the concave part of antitrapezoid shape formed on the substrate surface by etching.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8576277A JPS5421173A (en) | 1977-07-18 | 1977-07-18 | Manufacture for semiconductor having oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8576277A JPS5421173A (en) | 1977-07-18 | 1977-07-18 | Manufacture for semiconductor having oxide film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5421173A true JPS5421173A (en) | 1979-02-17 |
Family
ID=13867866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8576277A Pending JPS5421173A (en) | 1977-07-18 | 1977-07-18 | Manufacture for semiconductor having oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421173A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643744A (en) * | 1979-09-18 | 1981-04-22 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS5690541A (en) * | 1979-12-21 | 1981-07-22 | Nec Corp | Production of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51146187A (en) * | 1975-06-11 | 1976-12-15 | Hitachi Ltd | Diode device fabrication method |
-
1977
- 1977-07-18 JP JP8576277A patent/JPS5421173A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51146187A (en) * | 1975-06-11 | 1976-12-15 | Hitachi Ltd | Diode device fabrication method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643744A (en) * | 1979-09-18 | 1981-04-22 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS5690541A (en) * | 1979-12-21 | 1981-07-22 | Nec Corp | Production of semiconductor device |
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