Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP9502377ApriorityCriticalpatent/JPS5429586A/en
Publication of JPS5429586ApublicationCriticalpatent/JPS5429586A/en
PURPOSE: To make flat the surface of elements, by lowering the height of the bird head through etching the bird head on the selectively osidized part, after forming the element separating oxide film by selectively oxidizing the semiconductor surface.
COPYRIGHT: (C)1979,JPO&Japio
JP9502377A1977-08-101977-08-10Manufacture for semiconductor device
PendingJPS5429586A
(en)