JPS5290278A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS5290278A
JPS5290278A JP701876A JP701876A JPS5290278A JP S5290278 A JPS5290278 A JP S5290278A JP 701876 A JP701876 A JP 701876A JP 701876 A JP701876 A JP 701876A JP S5290278 A JPS5290278 A JP S5290278A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
semiconductor
poysi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP701876A
Other languages
Japanese (ja)
Inventor
Hiroyasu Toyoda
Tadao Kato
Kimiko Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP701876A priority Critical patent/JPS5290278A/en
Publication of JPS5290278A publication Critical patent/JPS5290278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To produce a semiconductor IC having high reliability by forming by etching an electrode of poySi then softening the photo resist film having been used as a mask.
COPYRIGHT: (C)1977,JPO&Japio
JP701876A 1976-01-23 1976-01-23 Production of semiconductor integrated circuit Pending JPS5290278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP701876A JPS5290278A (en) 1976-01-23 1976-01-23 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP701876A JPS5290278A (en) 1976-01-23 1976-01-23 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5290278A true JPS5290278A (en) 1977-07-29

Family

ID=11654289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP701876A Pending JPS5290278A (en) 1976-01-23 1976-01-23 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5290278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224360A (en) * 1985-03-28 1986-10-06 Sony Corp Manufacture of field effect transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224360A (en) * 1985-03-28 1986-10-06 Sony Corp Manufacture of field effect transistor

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