JPS5246787A - Coil for integrated circuit and process for production of same - Google Patents

Coil for integrated circuit and process for production of same

Info

Publication number
JPS5246787A
JPS5246787A JP12183075A JP12183075A JPS5246787A JP S5246787 A JPS5246787 A JP S5246787A JP 12183075 A JP12183075 A JP 12183075A JP 12183075 A JP12183075 A JP 12183075A JP S5246787 A JPS5246787 A JP S5246787A
Authority
JP
Japan
Prior art keywords
coil
production
same
integrated circuit
dicreasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12183075A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Nakagome
Kazuo Hoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12183075A priority Critical patent/JPS5246787A/en
Publication of JPS5246787A publication Critical patent/JPS5246787A/en
Pending legal-status Critical Current

Links

Landscapes

  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To compose a spirally wound coil in such a manner as to cross the groove direction by way of an insulating plate film within the groove formed in a semiconductor substrate, thereby forming an effective coil for IC without dicreasing the scale of integration.
COPYRIGHT: (C)1977,JPO&Japio
JP12183075A 1975-10-11 1975-10-11 Coil for integrated circuit and process for production of same Pending JPS5246787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12183075A JPS5246787A (en) 1975-10-11 1975-10-11 Coil for integrated circuit and process for production of same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12183075A JPS5246787A (en) 1975-10-11 1975-10-11 Coil for integrated circuit and process for production of same

Publications (1)

Publication Number Publication Date
JPS5246787A true JPS5246787A (en) 1977-04-13

Family

ID=14820973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12183075A Pending JPS5246787A (en) 1975-10-11 1975-10-11 Coil for integrated circuit and process for production of same

Country Status (1)

Country Link
JP (1) JPS5246787A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110009A (en) * 1979-02-16 1980-08-25 Tohoku Metal Ind Ltd Inductance element
JPS57195852U (en) * 1981-06-09 1982-12-11
JPH10189339A (en) * 1996-11-19 1998-07-21 Samsung Electron Co Ltd Semiconductor element and its manufacture
WO2000062314A1 (en) * 1999-04-14 2000-10-19 Takashi Nishi Microsolenoid coil and its manufacturing method
JP2008003105A (en) * 2003-02-25 2008-01-10 Samsung Electronics Co Ltd Magnetic field detection element and its manufacturing method
JP2009065042A (en) * 2007-09-07 2009-03-26 Mitsubishi Electric Corp High-frequency passive element and method of manufacturing the same
JP2014127512A (en) * 2012-12-25 2014-07-07 Fujitsu Semiconductor Ltd Wiring board, electronic device and manufacturing method for electronic device
JP2016535930A (en) * 2013-10-07 2016-11-17 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Precision batch manufacturing method for manufacturing ferrite rods
KR20180026472A (en) * 2015-06-25 2018-03-12 인텔 아이피 코포레이션 Vertical inductor for WLCSP
JP7201194B1 (en) * 2022-10-17 2023-01-10 マグネデザイン株式会社 Method for manufacturing magnetic field detection element
JP7203400B1 (en) * 2022-10-17 2023-01-13 マグネデザイン株式会社 Method for manufacturing GSR element
JP7207676B1 (en) * 2022-10-17 2023-01-18 マグネデザイン株式会社 Method for manufacturing GSR element
WO2024085098A1 (en) * 2022-10-17 2024-04-25 マグネデザイン株式会社 Gsr element manufacturing method

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110009A (en) * 1979-02-16 1980-08-25 Tohoku Metal Ind Ltd Inductance element
JPS57195852U (en) * 1981-06-09 1982-12-11
JPH10189339A (en) * 1996-11-19 1998-07-21 Samsung Electron Co Ltd Semiconductor element and its manufacture
JP4614477B2 (en) * 1996-11-19 2011-01-19 三星電子株式会社 Semiconductor device and manufacturing method thereof
WO2000062314A1 (en) * 1999-04-14 2000-10-19 Takashi Nishi Microsolenoid coil and its manufacturing method
US6725528B1 (en) 1999-04-14 2004-04-27 Takashi Nishi Microsolenoid coil and its manufacturing method
US7107668B2 (en) * 1999-04-14 2006-09-19 Takashi Nishi Method of manufacturing a longitudinal microsolenoid
JP2008003105A (en) * 2003-02-25 2008-01-10 Samsung Electronics Co Ltd Magnetic field detection element and its manufacturing method
JP2009065042A (en) * 2007-09-07 2009-03-26 Mitsubishi Electric Corp High-frequency passive element and method of manufacturing the same
JP2014127512A (en) * 2012-12-25 2014-07-07 Fujitsu Semiconductor Ltd Wiring board, electronic device and manufacturing method for electronic device
JP2016535930A (en) * 2013-10-07 2016-11-17 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Precision batch manufacturing method for manufacturing ferrite rods
KR20180026472A (en) * 2015-06-25 2018-03-12 인텔 아이피 코포레이션 Vertical inductor for WLCSP
JP2018524800A (en) * 2015-06-25 2018-08-30 インテル アイピー コーポレイション WLCSP vertical inductor
US10784033B2 (en) 2015-06-25 2020-09-22 Intel IP Corporation Vertical inductor for WLCSP
US11250981B2 (en) 2015-06-25 2022-02-15 Intel Corporation Vertical inductor for WLCSP
US11984246B2 (en) 2015-06-25 2024-05-14 Intel Corporation Vertical inductor for WLCSP
JP7201194B1 (en) * 2022-10-17 2023-01-10 マグネデザイン株式会社 Method for manufacturing magnetic field detection element
JP7203400B1 (en) * 2022-10-17 2023-01-13 マグネデザイン株式会社 Method for manufacturing GSR element
JP7207676B1 (en) * 2022-10-17 2023-01-18 マグネデザイン株式会社 Method for manufacturing GSR element
WO2024085098A1 (en) * 2022-10-17 2024-04-25 マグネデザイン株式会社 Gsr element manufacturing method
WO2024085097A1 (en) * 2022-10-17 2024-04-25 マグネデザイン株式会社 Production method for magnetic field detection element

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