JPS533772A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS533772A
JPS533772A JP7837676A JP7837676A JPS533772A JP S533772 A JPS533772 A JP S533772A JP 7837676 A JP7837676 A JP 7837676A JP 7837676 A JP7837676 A JP 7837676A JP S533772 A JPS533772 A JP S533772A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
semiconductor wafer
adhesiveness
improve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7837676A
Other languages
Japanese (ja)
Inventor
Kazuhisa Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7837676A priority Critical patent/JPS533772A/en
Publication of JPS533772A publication Critical patent/JPS533772A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To improve the adhesiveness of a photo resist film to a semiconductor wafer by suitably roughening the surface of the semiconductor wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP7837676A 1976-06-30 1976-06-30 Production of semiconductor device Pending JPS533772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7837676A JPS533772A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7837676A JPS533772A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS533772A true JPS533772A (en) 1978-01-13

Family

ID=13660288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7837676A Pending JPS533772A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS533772A (en)

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