JPS52125276A - Preparation of semiconductor integrated circuit device - Google Patents
Preparation of semiconductor integrated circuit deviceInfo
- Publication number
- JPS52125276A JPS52125276A JP4212876A JP4212876A JPS52125276A JP S52125276 A JPS52125276 A JP S52125276A JP 4212876 A JP4212876 A JP 4212876A JP 4212876 A JP4212876 A JP 4212876A JP S52125276 A JPS52125276 A JP S52125276A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- integrated circuit
- semiconductor integrated
- circuit device
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To reduce the numbers of formation of oxide films by etching previously the portions of the surface of a semiconductor substrate to which impurities are to be added firstly, whereby the ion injection process using a photoresist as a mask is rendered possible.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4212876A JPS52125276A (en) | 1976-04-14 | 1976-04-14 | Preparation of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4212876A JPS52125276A (en) | 1976-04-14 | 1976-04-14 | Preparation of semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52125276A true JPS52125276A (en) | 1977-10-20 |
JPS6142411B2 JPS6142411B2 (en) | 1986-09-20 |
Family
ID=12627292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4212876A Granted JPS52125276A (en) | 1976-04-14 | 1976-04-14 | Preparation of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52125276A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574124A (en) * | 1980-06-10 | 1982-01-09 | Fujitsu Ltd | Manufacture of germanium semiconductor device |
-
1976
- 1976-04-14 JP JP4212876A patent/JPS52125276A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574124A (en) * | 1980-06-10 | 1982-01-09 | Fujitsu Ltd | Manufacture of germanium semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6142411B2 (en) | 1986-09-20 |
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