JPS52119084A - Manufacture of semiconductor integrated circuit - Google Patents
Manufacture of semiconductor integrated circuitInfo
- Publication number
- JPS52119084A JPS52119084A JP3453376A JP3453376A JPS52119084A JP S52119084 A JPS52119084 A JP S52119084A JP 3453376 A JP3453376 A JP 3453376A JP 3453376 A JP3453376 A JP 3453376A JP S52119084 A JPS52119084 A JP S52119084A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- single crystal
- imlanting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To form a single crystal domain separated by a dielectric making a groove on a single crystal wafer and by imlanting ion and etching from backside after covering with a epi-layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3453376A JPS5840337B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3453376A JPS5840337B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119084A true JPS52119084A (en) | 1977-10-06 |
JPS5840337B2 JPS5840337B2 (en) | 1983-09-05 |
Family
ID=12416902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3453376A Expired JPS5840337B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5840337B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621341A (en) * | 1979-07-28 | 1981-02-27 | Oki Electric Ind Co Ltd | Manufacture of dielectric insulating separation substrate |
JPS57112045A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
JP2005122734A (en) * | 2003-10-10 | 2005-05-12 | Rosemount Inc | Compact process transmitter with improved lead wire connection |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0137871Y2 (en) * | 1984-09-26 | 1989-11-14 |
-
1976
- 1976-03-31 JP JP3453376A patent/JPS5840337B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621341A (en) * | 1979-07-28 | 1981-02-27 | Oki Electric Ind Co Ltd | Manufacture of dielectric insulating separation substrate |
JPS57112045A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
JP2005122734A (en) * | 2003-10-10 | 2005-05-12 | Rosemount Inc | Compact process transmitter with improved lead wire connection |
Also Published As
Publication number | Publication date |
---|---|
JPS5840337B2 (en) | 1983-09-05 |
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