JPS53135266A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53135266A
JPS53135266A JP5020677A JP5020677A JPS53135266A JP S53135266 A JPS53135266 A JP S53135266A JP 5020677 A JP5020677 A JP 5020677A JP 5020677 A JP5020677 A JP 5020677A JP S53135266 A JPS53135266 A JP S53135266A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
film
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5020677A
Other languages
Japanese (ja)
Inventor
Kaoru Inoue
Takashi Hirao
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5020677A priority Critical patent/JPS53135266A/en
Publication of JPS53135266A publication Critical patent/JPS53135266A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent a shallow junction part from being broken and obtain a good connection by making a film of the same materials as the substrate on the substrate and generating the alloy of this film and the first metallic layer to prevent the invasion into the sbustrate.
COPYRIGHT: (C)1978,JPO&Japio
JP5020677A 1977-04-30 1977-04-30 Production of semiconductor device Pending JPS53135266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5020677A JPS53135266A (en) 1977-04-30 1977-04-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5020677A JPS53135266A (en) 1977-04-30 1977-04-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53135266A true JPS53135266A (en) 1978-11-25

Family

ID=12852627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5020677A Pending JPS53135266A (en) 1977-04-30 1977-04-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53135266A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58128732A (en) * 1982-01-27 1983-08-01 Hitachi Ltd Formation of metallic silicide electrode and wiring therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58128732A (en) * 1982-01-27 1983-08-01 Hitachi Ltd Formation of metallic silicide electrode and wiring therefor
JPH0423822B2 (en) * 1982-01-27 1992-04-23 Hitachi Ltd

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