JPS5341986A - Production of semiconductor unit - Google Patents

Production of semiconductor unit

Info

Publication number
JPS5341986A
JPS5341986A JP11605476A JP11605476A JPS5341986A JP S5341986 A JPS5341986 A JP S5341986A JP 11605476 A JP11605476 A JP 11605476A JP 11605476 A JP11605476 A JP 11605476A JP S5341986 A JPS5341986 A JP S5341986A
Authority
JP
Japan
Prior art keywords
production
semiconductor unit
substrate
insulating layer
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11605476A
Other languages
Japanese (ja)
Inventor
Nozomi Harada
Nobuhisa Kubota
Hiroyuki Nihei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11605476A priority Critical patent/JPS5341986A/en
Publication of JPS5341986A publication Critical patent/JPS5341986A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: After stacking the first insulating layer, impurity added poly-Si, and the second insulating layer on a substrate, these layers are etched selectively; and when the substrate is exposed, FET is made without exposing the poly-Si layer to an atmosphere at elevated temperatures, so that the change of a threshold voltage can be prevented.
COPYRIGHT: (C)1978,JPO&Japio
JP11605476A 1976-09-29 1976-09-29 Production of semiconductor unit Pending JPS5341986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11605476A JPS5341986A (en) 1976-09-29 1976-09-29 Production of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11605476A JPS5341986A (en) 1976-09-29 1976-09-29 Production of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5341986A true JPS5341986A (en) 1978-04-15

Family

ID=14677551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11605476A Pending JPS5341986A (en) 1976-09-29 1976-09-29 Production of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5341986A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655073A (en) * 1979-10-11 1981-05-15 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS593309A (en) * 1982-06-08 1984-01-10 ヴィルト　ライツ　アクチエンゲゼルシャフト Level base for geodetic apparatus
JPS5990814U (en) * 1982-12-11 1984-06-20 河原　重保 Fine adjustment mechanism of surveying plummet

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655073A (en) * 1979-10-11 1981-05-15 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS593309A (en) * 1982-06-08 1984-01-10 ヴィルト　ライツ　アクチエンゲゼルシャフト Level base for geodetic apparatus
JPH0345770B2 (en) * 1982-06-08 1991-07-12 Uiruto Raitsu Gmbh
JPS5990814U (en) * 1982-12-11 1984-06-20 河原　重保 Fine adjustment mechanism of surveying plummet

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