JPS5341987A - Semiconductor unit and its production - Google Patents

Semiconductor unit and its production

Info

Publication number
JPS5341987A
JPS5341987A JP11643776A JP11643776A JPS5341987A JP S5341987 A JPS5341987 A JP S5341987A JP 11643776 A JP11643776 A JP 11643776A JP 11643776 A JP11643776 A JP 11643776A JP S5341987 A JPS5341987 A JP S5341987A
Authority
JP
Japan
Prior art keywords
production
semiconductor unit
layer
capatity
parasitic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11643776A
Other languages
Japanese (ja)
Inventor
Takayuki Kadaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP11643776A priority Critical patent/JPS5341987A/en
Publication of JPS5341987A publication Critical patent/JPS5341987A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: A poly-Si layer on a substrate is oxidized to be changed to an insulating layer essentially after being made porous selectively, and wiring layer disconnection is prevented, thereby reducing a parasitic capatity.
COPYRIGHT: (C)1978,JPO&Japio
JP11643776A 1976-09-28 1976-09-28 Semiconductor unit and its production Pending JPS5341987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11643776A JPS5341987A (en) 1976-09-28 1976-09-28 Semiconductor unit and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11643776A JPS5341987A (en) 1976-09-28 1976-09-28 Semiconductor unit and its production

Publications (1)

Publication Number Publication Date
JPS5341987A true JPS5341987A (en) 1978-04-15

Family

ID=14687074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11643776A Pending JPS5341987A (en) 1976-09-28 1976-09-28 Semiconductor unit and its production

Country Status (1)

Country Link
JP (1) JPS5341987A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61268043A (en) * 1985-05-23 1986-11-27 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61268043A (en) * 1985-05-23 1986-11-27 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof

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