JPS5371582A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5371582A JPS5371582A JP14725876A JP14725876A JPS5371582A JP S5371582 A JPS5371582 A JP S5371582A JP 14725876 A JP14725876 A JP 14725876A JP 14725876 A JP14725876 A JP 14725876A JP S5371582 A JPS5371582 A JP S5371582A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- patterned
- layer
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: After being formed on a semiconductor substrate, an insulating film is patterned and covered to grow an epitaxial layer, and among this grown layer, the both side wall parts of the patterned insulating film are selectively oxidized to be converted into an insulating layers, so that the insulation at an emitter region will be perfect by forming the desired-depth insulating layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14725876A JPS5371582A (en) | 1976-12-08 | 1976-12-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14725876A JPS5371582A (en) | 1976-12-08 | 1976-12-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5371582A true JPS5371582A (en) | 1978-06-26 |
Family
ID=15426153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14725876A Pending JPS5371582A (en) | 1976-12-08 | 1976-12-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371582A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3955269A (en) * | 1975-06-19 | 1976-05-11 | International Business Machines Corporation | Fabricating high performance integrated bipolar and complementary field effect transistors |
-
1976
- 1976-12-08 JP JP14725876A patent/JPS5371582A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3955269A (en) * | 1975-06-19 | 1976-05-11 | International Business Machines Corporation | Fabricating high performance integrated bipolar and complementary field effect transistors |
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