JPS52104068A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52104068A
JPS52104068A JP2000476A JP2000476A JPS52104068A JP S52104068 A JPS52104068 A JP S52104068A JP 2000476 A JP2000476 A JP 2000476A JP 2000476 A JP2000476 A JP 2000476A JP S52104068 A JPS52104068 A JP S52104068A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
insulation film
mask
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000476A
Other languages
Japanese (ja)
Inventor
Akira Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2000476A priority Critical patent/JPS52104068A/en
Publication of JPS52104068A publication Critical patent/JPS52104068A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To perform etching of insulation film owing to mask being formed by covering Si layer and selectively peeling off, through a posi type photo resist insulation film.
COPYRIGHT: (C)1977,JPO&Japio
JP2000476A 1976-02-27 1976-02-27 Production of semiconductor device Pending JPS52104068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000476A JPS52104068A (en) 1976-02-27 1976-02-27 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000476A JPS52104068A (en) 1976-02-27 1976-02-27 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52104068A true JPS52104068A (en) 1977-09-01

Family

ID=12014981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000476A Pending JPS52104068A (en) 1976-02-27 1976-02-27 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52104068A (en)

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