JPS52127172A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS52127172A
JPS52127172A JP4452176A JP4452176A JPS52127172A JP S52127172 A JPS52127172 A JP S52127172A JP 4452176 A JP4452176 A JP 4452176A JP 4452176 A JP4452176 A JP 4452176A JP S52127172 A JPS52127172 A JP S52127172A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
sio
enduring
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4452176A
Other languages
Japanese (ja)
Other versions
JPS6159537B2 (en
Inventor
Kiyohiro Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4452176A priority Critical patent/JPS52127172A/en
Publication of JPS52127172A publication Critical patent/JPS52127172A/en
Publication of JPS6159537B2 publication Critical patent/JPS6159537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To form a flat surface, to prevent a break of a metallic wiring path and, moreover, to make leakage current small by coating a material for a mask enduring etching of a SiO2 film on the SiO2 layer for insulation separation.
COPYRIGHT: (C)1977,JPO&Japio
JP4452176A 1976-04-19 1976-04-19 Semiconductor device and its manufacture Granted JPS52127172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4452176A JPS52127172A (en) 1976-04-19 1976-04-19 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4452176A JPS52127172A (en) 1976-04-19 1976-04-19 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS52127172A true JPS52127172A (en) 1977-10-25
JPS6159537B2 JPS6159537B2 (en) 1986-12-17

Family

ID=12693832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4452176A Granted JPS52127172A (en) 1976-04-19 1976-04-19 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS52127172A (en)

Also Published As

Publication number Publication date
JPS6159537B2 (en) 1986-12-17

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