JPS5370685A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5370685A
JPS5370685A JP14634276A JP14634276A JPS5370685A JP S5370685 A JPS5370685 A JP S5370685A JP 14634276 A JP14634276 A JP 14634276A JP 14634276 A JP14634276 A JP 14634276A JP S5370685 A JPS5370685 A JP S5370685A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
integrated circuits
leakage current
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14634276A
Other languages
Japanese (ja)
Other versions
JPS562420B2 (en
Inventor
Kenji Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14634276A priority Critical patent/JPS5370685A/en
Publication of JPS5370685A publication Critical patent/JPS5370685A/en
Publication of JPS562420B2 publication Critical patent/JPS562420B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To form integrated circuits without flowing leakage current to field regions by selectively growing insulation films and semiconductor layers of a low concentration on the surface of a semiconductor layer whose impurity concentration at the surface part is high.
COPYRIGHT: (C)1978,JPO&Japio
JP14634276A 1976-12-06 1976-12-06 Production of semiconductor device Granted JPS5370685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14634276A JPS5370685A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14634276A JPS5370685A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5370685A true JPS5370685A (en) 1978-06-23
JPS562420B2 JPS562420B2 (en) 1981-01-20

Family

ID=15405520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14634276A Granted JPS5370685A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5370685A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596556A (en) * 1982-07-02 1984-01-13 Matsushita Electronics Corp Manufacture of semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4891986A (en) * 1972-03-07 1973-11-29
JPS5066186A (en) * 1973-10-12 1975-06-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4891986A (en) * 1972-03-07 1973-11-29
JPS5066186A (en) * 1973-10-12 1975-06-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596556A (en) * 1982-07-02 1984-01-13 Matsushita Electronics Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS562420B2 (en) 1981-01-20

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