JPS5370685A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5370685A JPS5370685A JP14634276A JP14634276A JPS5370685A JP S5370685 A JPS5370685 A JP S5370685A JP 14634276 A JP14634276 A JP 14634276A JP 14634276 A JP14634276 A JP 14634276A JP S5370685 A JPS5370685 A JP S5370685A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- integrated circuits
- leakage current
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To form integrated circuits without flowing leakage current to field regions by selectively growing insulation films and semiconductor layers of a low concentration on the surface of a semiconductor layer whose impurity concentration at the surface part is high.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14634276A JPS5370685A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14634276A JPS5370685A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5370685A true JPS5370685A (en) | 1978-06-23 |
JPS562420B2 JPS562420B2 (en) | 1981-01-20 |
Family
ID=15405520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14634276A Granted JPS5370685A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5370685A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS596556A (en) * | 1982-07-02 | 1984-01-13 | Matsushita Electronics Corp | Manufacture of semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4891986A (en) * | 1972-03-07 | 1973-11-29 | ||
JPS5066186A (en) * | 1973-10-12 | 1975-06-04 |
-
1976
- 1976-12-06 JP JP14634276A patent/JPS5370685A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4891986A (en) * | 1972-03-07 | 1973-11-29 | ||
JPS5066186A (en) * | 1973-10-12 | 1975-06-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS596556A (en) * | 1982-07-02 | 1984-01-13 | Matsushita Electronics Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS562420B2 (en) | 1981-01-20 |
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