JPS53117963A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53117963A
JPS53117963A JP3212977A JP3212977A JPS53117963A JP S53117963 A JPS53117963 A JP S53117963A JP 3212977 A JP3212977 A JP 3212977A JP 3212977 A JP3212977 A JP 3212977A JP S53117963 A JPS53117963 A JP S53117963A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
vapor
oxide film
film containing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3212977A
Other languages
Japanese (ja)
Inventor
Takahiko Moriya
Kei Kirita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3212977A priority Critical patent/JPS53117963A/en
Publication of JPS53117963A publication Critical patent/JPS53117963A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To make a high-concentration diffused layer surface with high accuracy by vapor-phase etching the substrate surface thereafter covering the surface with an oxide film containing As or Sb and performing diffusion treatment.
COPYRIGHT: (C)1978,JPO&Japio
JP3212977A 1977-03-25 1977-03-25 Production of semiconductor device Pending JPS53117963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3212977A JPS53117963A (en) 1977-03-25 1977-03-25 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3212977A JPS53117963A (en) 1977-03-25 1977-03-25 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53117963A true JPS53117963A (en) 1978-10-14

Family

ID=12350266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3212977A Pending JPS53117963A (en) 1977-03-25 1977-03-25 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53117963A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63249332A (en) * 1987-04-06 1988-10-17 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63249332A (en) * 1987-04-06 1988-10-17 Toshiba Corp Manufacture of semiconductor device

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