JPS53120264A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53120264A JPS53120264A JP3586677A JP3586677A JPS53120264A JP S53120264 A JPS53120264 A JP S53120264A JP 3586677 A JP3586677 A JP 3586677A JP 3586677 A JP3586677 A JP 3586677A JP S53120264 A JPS53120264 A JP S53120264A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- impurity
- semiconductor substrate
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent the reaction of the impurity to the oxide film at the abnormally high-density area and thus to ensure a uniform diffusion, by forming an oxide film through oxidation of the surface of the semiconductor substrate and then diffusing the impurity to the semiconductor substrate form the surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3586677A JPS53120264A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3586677A JPS53120264A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53120264A true JPS53120264A (en) | 1978-10-20 |
Family
ID=12453900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3586677A Pending JPS53120264A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120264A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59175720A (en) * | 1983-03-25 | 1984-10-04 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1977
- 1977-03-29 JP JP3586677A patent/JPS53120264A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59175720A (en) * | 1983-03-25 | 1984-10-04 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
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