JPS53120264A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53120264A
JPS53120264A JP3586677A JP3586677A JPS53120264A JP S53120264 A JPS53120264 A JP S53120264A JP 3586677 A JP3586677 A JP 3586677A JP 3586677 A JP3586677 A JP 3586677A JP S53120264 A JPS53120264 A JP S53120264A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
impurity
semiconductor substrate
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3586677A
Other languages
Japanese (ja)
Inventor
Toshihiro Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3586677A priority Critical patent/JPS53120264A/en
Publication of JPS53120264A publication Critical patent/JPS53120264A/en
Pending legal-status Critical Current

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Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To prevent the reaction of the impurity to the oxide film at the abnormally high-density area and thus to ensure a uniform diffusion, by forming an oxide film through oxidation of the surface of the semiconductor substrate and then diffusing the impurity to the semiconductor substrate form the surface.
COPYRIGHT: (C)1978,JPO&Japio
JP3586677A 1977-03-29 1977-03-29 Manufacture of semiconductor device Pending JPS53120264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3586677A JPS53120264A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3586677A JPS53120264A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53120264A true JPS53120264A (en) 1978-10-20

Family

ID=12453900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3586677A Pending JPS53120264A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53120264A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175720A (en) * 1983-03-25 1984-10-04 Oki Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175720A (en) * 1983-03-25 1984-10-04 Oki Electric Ind Co Ltd Manufacture of semiconductor device

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