JPS53108278A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53108278A JPS53108278A JP13705977A JP13705977A JPS53108278A JP S53108278 A JPS53108278 A JP S53108278A JP 13705977 A JP13705977 A JP 13705977A JP 13705977 A JP13705977 A JP 13705977A JP S53108278 A JPS53108278 A JP S53108278A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- film
- poly
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a semiconductor device which features a highly chemical, mechanical and thermal reliability, by forming the electrode for the device which contains an especially shallow junction through reaction between poly Si film and Al film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13705977A JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13705977A JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP725973A Division JPS5317393B2 (en) | 1973-01-16 | 1973-01-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53108278A true JPS53108278A (en) | 1978-09-20 |
JPS5442585B2 JPS5442585B2 (en) | 1979-12-14 |
Family
ID=15189919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13705977A Granted JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53108278A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004335899A (en) * | 2003-05-09 | 2004-11-25 | Denso Corp | Manufacturing method of silicon-carbide semiconductor device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3567509A (en) * | 1965-07-22 | 1971-03-02 | Ibm | Metal-insulator films for semiconductor devices |
JPS4841070A (en) * | 1971-09-27 | 1973-06-16 | ||
JPS4847772A (en) * | 1971-10-13 | 1973-07-06 | ||
JPS4924171U (en) * | 1972-05-31 | 1974-03-01 | ||
JPS4973083A (en) * | 1972-11-13 | 1974-07-15 | ||
JPS511586A (en) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO |
JPS5441871A (en) * | 1977-08-26 | 1979-04-03 | Delalande Sa | Novel 55hydroxymethyloxazolidinons and its manufacture |
-
1977
- 1977-11-14 JP JP13705977A patent/JPS53108278A/en active Granted
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3567509A (en) * | 1965-07-22 | 1971-03-02 | Ibm | Metal-insulator films for semiconductor devices |
JPS4841070A (en) * | 1971-09-27 | 1973-06-16 | ||
JPS4847772A (en) * | 1971-10-13 | 1973-07-06 | ||
JPS4924171U (en) * | 1972-05-31 | 1974-03-01 | ||
JPS4973083A (en) * | 1972-11-13 | 1974-07-15 | ||
JPS511586A (en) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO |
JPS5441871A (en) * | 1977-08-26 | 1979-04-03 | Delalande Sa | Novel 55hydroxymethyloxazolidinons and its manufacture |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004335899A (en) * | 2003-05-09 | 2004-11-25 | Denso Corp | Manufacturing method of silicon-carbide semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5442585B2 (en) | 1979-12-14 |
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