JPS53108278A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53108278A
JPS53108278A JP13705977A JP13705977A JPS53108278A JP S53108278 A JPS53108278 A JP S53108278A JP 13705977 A JP13705977 A JP 13705977A JP 13705977 A JP13705977 A JP 13705977A JP S53108278 A JPS53108278 A JP S53108278A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
film
poly
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13705977A
Other languages
Japanese (ja)
Other versions
JPS5442585B2 (en
Inventor
Koichiro Takahata
Hiroshi Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13705977A priority Critical patent/JPS53108278A/en
Publication of JPS53108278A publication Critical patent/JPS53108278A/en
Publication of JPS5442585B2 publication Critical patent/JPS5442585B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semiconductor device which features a highly chemical, mechanical and thermal reliability, by forming the electrode for the device which contains an especially shallow junction through reaction between poly Si film and Al film.
COPYRIGHT: (C)1978,JPO&Japio
JP13705977A 1977-11-14 1977-11-14 Manufacture of semiconductor device Granted JPS53108278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13705977A JPS53108278A (en) 1977-11-14 1977-11-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13705977A JPS53108278A (en) 1977-11-14 1977-11-14 Manufacture of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP725973A Division JPS5317393B2 (en) 1973-01-16 1973-01-16

Publications (2)

Publication Number Publication Date
JPS53108278A true JPS53108278A (en) 1978-09-20
JPS5442585B2 JPS5442585B2 (en) 1979-12-14

Family

ID=15189919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13705977A Granted JPS53108278A (en) 1977-11-14 1977-11-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53108278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004335899A (en) * 2003-05-09 2004-11-25 Denso Corp Manufacturing method of silicon-carbide semiconductor device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567509A (en) * 1965-07-22 1971-03-02 Ibm Metal-insulator films for semiconductor devices
JPS4841070A (en) * 1971-09-27 1973-06-16
JPS4847772A (en) * 1971-10-13 1973-07-06
JPS4924171U (en) * 1972-05-31 1974-03-01
JPS4973083A (en) * 1972-11-13 1974-07-15
JPS511586A (en) * 1974-06-26 1976-01-08 Toyo Kogyo Co KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO
JPS5441871A (en) * 1977-08-26 1979-04-03 Delalande Sa Novel 55hydroxymethyloxazolidinons and its manufacture

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567509A (en) * 1965-07-22 1971-03-02 Ibm Metal-insulator films for semiconductor devices
JPS4841070A (en) * 1971-09-27 1973-06-16
JPS4847772A (en) * 1971-10-13 1973-07-06
JPS4924171U (en) * 1972-05-31 1974-03-01
JPS4973083A (en) * 1972-11-13 1974-07-15
JPS511586A (en) * 1974-06-26 1976-01-08 Toyo Kogyo Co KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO
JPS5441871A (en) * 1977-08-26 1979-04-03 Delalande Sa Novel 55hydroxymethyloxazolidinons and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004335899A (en) * 2003-05-09 2004-11-25 Denso Corp Manufacturing method of silicon-carbide semiconductor device

Also Published As

Publication number Publication date
JPS5442585B2 (en) 1979-12-14

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