JPS53135568A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53135568A
JPS53135568A JP5043877A JP5043877A JPS53135568A JP S53135568 A JPS53135568 A JP S53135568A JP 5043877 A JP5043877 A JP 5043877A JP 5043877 A JP5043877 A JP 5043877A JP S53135568 A JPS53135568 A JP S53135568A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
wafer
plane
reinforcement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5043877A
Other languages
Japanese (ja)
Inventor
Akifumi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5043877A priority Critical patent/JPS53135568A/en
Publication of JPS53135568A publication Critical patent/JPS53135568A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent damage of wafer, by providing a projecting part for reinforcement at the circumference of one plane of a semiconductor wafer and by forming the pattern of a planer type semiconductor device of another plane.
COPYRIGHT: (C)1978,JPO&Japio
JP5043877A 1977-04-30 1977-04-30 Manufacture for semiconductor device Pending JPS53135568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5043877A JPS53135568A (en) 1977-04-30 1977-04-30 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5043877A JPS53135568A (en) 1977-04-30 1977-04-30 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53135568A true JPS53135568A (en) 1978-11-27

Family

ID=12858853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5043877A Pending JPS53135568A (en) 1977-04-30 1977-04-30 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53135568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587815A (en) * 1981-07-06 1983-01-17 Toshiba Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587815A (en) * 1981-07-06 1983-01-17 Toshiba Corp Semiconductor device

Similar Documents

Publication Publication Date Title
JPS51120180A (en) Pattern printing device
JPS5352072A (en) Pattern for alignment
JPS5223263A (en) Method of manufacturing semiconductor device
JPS5255871A (en) Production of semiconductor
JPS5230167A (en) Method for production of semiconductor device
JPS5425169A (en) Matching method for photo mask against semiconductor wafer
JPS53135568A (en) Manufacture for semiconductor device
JPS5342659A (en) Semiconductor integrated circuit
JPS53116077A (en) Etching method
JPS51121272A (en) Manufacturing method for semiconductor devices
JPS5372567A (en) Semiconductor device
JPS538072A (en) Semiconductor device
JPS535573A (en) Photo mask for semiconductor device
JPS5422171A (en) Manufacture of semiconductor device
JPS51142795A (en) Grinding device
JPS5437468A (en) Breaking device for semiconductor wafer
JPS52153669A (en) Photo mask of semiconductor integrated circuit
JPS5216171A (en) Mask fitting device
JPS51131277A (en) Semi-conductor unit manufacturing process
JPS51118369A (en) Manufacturing process for simiconduator unit
JPS5424574A (en) Manufacture for semiconductor device
JPS52108925A (en) Protease inhibitor
JPS5411672A (en) Manufacture for semiconductor device
JPS51135465A (en) Semi-conductor unit
JPS533169A (en) Production of semiconductor device