JPS53135568A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53135568A JPS53135568A JP5043877A JP5043877A JPS53135568A JP S53135568 A JPS53135568 A JP S53135568A JP 5043877 A JP5043877 A JP 5043877A JP 5043877 A JP5043877 A JP 5043877A JP S53135568 A JPS53135568 A JP S53135568A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- wafer
- plane
- reinforcement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To prevent damage of wafer, by providing a projecting part for reinforcement at the circumference of one plane of a semiconductor wafer and by forming the pattern of a planer type semiconductor device of another plane.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5043877A JPS53135568A (en) | 1977-04-30 | 1977-04-30 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5043877A JPS53135568A (en) | 1977-04-30 | 1977-04-30 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53135568A true JPS53135568A (en) | 1978-11-27 |
Family
ID=12858853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5043877A Pending JPS53135568A (en) | 1977-04-30 | 1977-04-30 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53135568A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587815A (en) * | 1981-07-06 | 1983-01-17 | Toshiba Corp | Semiconductor device |
-
1977
- 1977-04-30 JP JP5043877A patent/JPS53135568A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587815A (en) * | 1981-07-06 | 1983-01-17 | Toshiba Corp | Semiconductor device |
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