JPS5379387A - Optical mask - Google Patents

Optical mask

Info

Publication number
JPS5379387A
JPS5379387A JP15572876A JP15572876A JPS5379387A JP S5379387 A JPS5379387 A JP S5379387A JP 15572876 A JP15572876 A JP 15572876A JP 15572876 A JP15572876 A JP 15572876A JP S5379387 A JPS5379387 A JP S5379387A
Authority
JP
Japan
Prior art keywords
optical mask
parts
masks
themselves
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15572876A
Other languages
Japanese (ja)
Inventor
Takeshige Obata
Teruo Iino
Toshio Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15572876A priority Critical patent/JPS5379387A/en
Publication of JPS5379387A publication Critical patent/JPS5379387A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent bonding of masks to themselves by forming grooves from the boundary portions between element pattern parts up to substrate and parts.
COPYRIGHT: (C)1978,JPO&Japio
JP15572876A 1976-12-23 1976-12-23 Optical mask Pending JPS5379387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15572876A JPS5379387A (en) 1976-12-23 1976-12-23 Optical mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15572876A JPS5379387A (en) 1976-12-23 1976-12-23 Optical mask

Publications (1)

Publication Number Publication Date
JPS5379387A true JPS5379387A (en) 1978-07-13

Family

ID=15612157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15572876A Pending JPS5379387A (en) 1976-12-23 1976-12-23 Optical mask

Country Status (1)

Country Link
JP (1) JPS5379387A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01102464A (en) * 1987-10-15 1989-04-20 Nec Kyushu Ltd Photomask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01102464A (en) * 1987-10-15 1989-04-20 Nec Kyushu Ltd Photomask
JPH0551892B2 (en) * 1987-10-15 1993-08-03 Kyushu Nippon Electric

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