JPS5379387A - Optical mask - Google Patents
Optical maskInfo
- Publication number
- JPS5379387A JPS5379387A JP15572876A JP15572876A JPS5379387A JP S5379387 A JPS5379387 A JP S5379387A JP 15572876 A JP15572876 A JP 15572876A JP 15572876 A JP15572876 A JP 15572876A JP S5379387 A JPS5379387 A JP S5379387A
- Authority
- JP
- Japan
- Prior art keywords
- optical mask
- parts
- masks
- themselves
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To prevent bonding of masks to themselves by forming grooves from the boundary portions between element pattern parts up to substrate and parts.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15572876A JPS5379387A (en) | 1976-12-23 | 1976-12-23 | Optical mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15572876A JPS5379387A (en) | 1976-12-23 | 1976-12-23 | Optical mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5379387A true JPS5379387A (en) | 1978-07-13 |
Family
ID=15612157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15572876A Pending JPS5379387A (en) | 1976-12-23 | 1976-12-23 | Optical mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5379387A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01102464A (en) * | 1987-10-15 | 1989-04-20 | Nec Kyushu Ltd | Photomask |
-
1976
- 1976-12-23 JP JP15572876A patent/JPS5379387A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01102464A (en) * | 1987-10-15 | 1989-04-20 | Nec Kyushu Ltd | Photomask |
JPH0551892B2 (en) * | 1987-10-15 | 1993-08-03 | Kyushu Nippon Electric |
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