JPS5371585A - Electrode formation method - Google Patents
Electrode formation methodInfo
- Publication number
- JPS5371585A JPS5371585A JP14652076A JP14652076A JPS5371585A JP S5371585 A JPS5371585 A JP S5371585A JP 14652076 A JP14652076 A JP 14652076A JP 14652076 A JP14652076 A JP 14652076A JP S5371585 A JPS5371585 A JP S5371585A
- Authority
- JP
- Japan
- Prior art keywords
- formation method
- electrode formation
- etching
- electrode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain the electrode of a minute pattern laminated with Pt and Au by selectively plasma-etching or sputter-etching a Pt layer with the Au layer covering on it taken as a mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14652076A JPS5371585A (en) | 1976-12-08 | 1976-12-08 | Electrode formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14652076A JPS5371585A (en) | 1976-12-08 | 1976-12-08 | Electrode formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5371585A true JPS5371585A (en) | 1978-06-26 |
Family
ID=15409499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14652076A Pending JPS5371585A (en) | 1976-12-08 | 1976-12-08 | Electrode formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371585A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56148824A (en) * | 1980-04-21 | 1981-11-18 | Nec Corp | Formation of electrode |
-
1976
- 1976-12-08 JP JP14652076A patent/JPS5371585A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56148824A (en) * | 1980-04-21 | 1981-11-18 | Nec Corp | Formation of electrode |
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