JPS52146209A - Formation of epitaxial layer - Google Patents

Formation of epitaxial layer

Info

Publication number
JPS52146209A
JPS52146209A JP6230476A JP6230476A JPS52146209A JP S52146209 A JPS52146209 A JP S52146209A JP 6230476 A JP6230476 A JP 6230476A JP 6230476 A JP6230476 A JP 6230476A JP S52146209 A JPS52146209 A JP S52146209A
Authority
JP
Japan
Prior art keywords
epitaxial layer
formation
circuit board
printed circuit
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6230476A
Other languages
Japanese (ja)
Inventor
Tetsuo Asano
Susumu Takahashi
Motonao Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6230476A priority Critical patent/JPS52146209A/en
Publication of JPS52146209A publication Critical patent/JPS52146209A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form an epitaxial layer on a concave semi-conductor printed circuit board and obtain an imbedded plain-surfaced epitaxial layer by eliminating the said layer deep into the semi-conductor printed circuit board surface through etching.
COPYRIGHT: (C)1977,JPO&Japio
JP6230476A 1976-05-31 1976-05-31 Formation of epitaxial layer Pending JPS52146209A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6230476A JPS52146209A (en) 1976-05-31 1976-05-31 Formation of epitaxial layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6230476A JPS52146209A (en) 1976-05-31 1976-05-31 Formation of epitaxial layer

Publications (1)

Publication Number Publication Date
JPS52146209A true JPS52146209A (en) 1977-12-05

Family

ID=13196252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6230476A Pending JPS52146209A (en) 1976-05-31 1976-05-31 Formation of epitaxial layer

Country Status (1)

Country Link
JP (1) JPS52146209A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739584A (en) * 1980-08-20 1982-03-04 Sumitomo Electric Ind Ltd Semiconductor device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739584A (en) * 1980-08-20 1982-03-04 Sumitomo Electric Ind Ltd Semiconductor device and manufacture thereof

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