JPS52140276A - Photo mask - Google Patents

Photo mask

Info

Publication number
JPS52140276A
JPS52140276A JP5738676A JP5738676A JPS52140276A JP S52140276 A JPS52140276 A JP S52140276A JP 5738676 A JP5738676 A JP 5738676A JP 5738676 A JP5738676 A JP 5738676A JP S52140276 A JPS52140276 A JP S52140276A
Authority
JP
Japan
Prior art keywords
photo mask
layer
concavity
deep
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5738676A
Other languages
Japanese (ja)
Inventor
Shuji Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5738676A priority Critical patent/JPS52140276A/en
Publication of JPS52140276A publication Critical patent/JPS52140276A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent both the pattern disturbance and the pinhole occurrence by providing a concavity of 0.7 times as deep as the thickness of the light shielding layer at the area except for the layer circumference sector.
COPYRIGHT: (C)1977,JPO&Japio
JP5738676A 1976-05-18 1976-05-18 Photo mask Pending JPS52140276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5738676A JPS52140276A (en) 1976-05-18 1976-05-18 Photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5738676A JPS52140276A (en) 1976-05-18 1976-05-18 Photo mask

Publications (1)

Publication Number Publication Date
JPS52140276A true JPS52140276A (en) 1977-11-22

Family

ID=13054160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5738676A Pending JPS52140276A (en) 1976-05-18 1976-05-18 Photo mask

Country Status (1)

Country Link
JP (1) JPS52140276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52160402U (en) * 1976-05-31 1977-12-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52160402U (en) * 1976-05-31 1977-12-06

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