JPS5431281A - Optical exposure mask - Google Patents

Optical exposure mask

Info

Publication number
JPS5431281A
JPS5431281A JP9737377A JP9737377A JPS5431281A JP S5431281 A JPS5431281 A JP S5431281A JP 9737377 A JP9737377 A JP 9737377A JP 9737377 A JP9737377 A JP 9737377A JP S5431281 A JPS5431281 A JP S5431281A
Authority
JP
Japan
Prior art keywords
exposure mask
optical exposure
light shielding
shielding layer
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9737377A
Other languages
Japanese (ja)
Inventor
Katsumi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9737377A priority Critical patent/JPS5431281A/en
Publication of JPS5431281A publication Critical patent/JPS5431281A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a light shielding layer with low resistance by using the impurity-doped semiconductor layer as the light shielding layer.
COPYRIGHT: (C)1979,JPO&Japio
JP9737377A 1977-08-12 1977-08-12 Optical exposure mask Pending JPS5431281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9737377A JPS5431281A (en) 1977-08-12 1977-08-12 Optical exposure mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9737377A JPS5431281A (en) 1977-08-12 1977-08-12 Optical exposure mask

Publications (1)

Publication Number Publication Date
JPS5431281A true JPS5431281A (en) 1979-03-08

Family

ID=14190697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9737377A Pending JPS5431281A (en) 1977-08-12 1977-08-12 Optical exposure mask

Country Status (1)

Country Link
JP (1) JPS5431281A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063585A (en) * 2010-09-16 2012-03-29 Toppan Printing Co Ltd Photomask blank and photomask
WO2022004456A1 (en) * 2020-06-30 2022-01-06 アルバック成膜株式会社 Mask blank manufacturing method, mask blank, photomask manufacturing method, and photomask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063585A (en) * 2010-09-16 2012-03-29 Toppan Printing Co Ltd Photomask blank and photomask
WO2022004456A1 (en) * 2020-06-30 2022-01-06 アルバック成膜株式会社 Mask blank manufacturing method, mask blank, photomask manufacturing method, and photomask

Similar Documents

Publication Publication Date Title
JPS5228875A (en) Mask
JPS5396674A (en) Photo mask
JPS52144218A (en) Solid pickup element
JPS5225576A (en) Exposure method of photo-resist
JPS5431281A (en) Optical exposure mask
JPS5222789A (en) Transparent conductive film
JPS51148365A (en) Electron beam exposure method
JPS5230428A (en) Photoresist exposure method
JPS5431282A (en) Pattern formation method
JPS5421273A (en) Manufacture for photo mask
JPS5329073A (en) Mask for x-ray exposure
JPS522193A (en) Light warning device
JPS5430135A (en) 4-hydroxy-4-methyl-cyclohexene-2-one-1
JPS52140351A (en) Time series hologram photographing device
JPS5382173A (en) Positioning method
JPS548978A (en) Manufacture of photto mask
JPS542079A (en) Light emission unit of semiconductor
JPS5422775A (en) Semiconductor device
JPS53149020A (en) Data photographing device for camera
JPS53134368A (en) Manufacture for photo mask
JPS5216891A (en) Medical illuminator
JPS53108315A (en) Light receiving unit
JPS5376750A (en) Anodic oxidation method
JPS53105375A (en) Semiconductor device
JPS5211247A (en) Flame-retarded resin composition