JPS5421273A - Manufacture for photo mask - Google Patents

Manufacture for photo mask

Info

Publication number
JPS5421273A
JPS5421273A JP8683177A JP8683177A JPS5421273A JP S5421273 A JPS5421273 A JP S5421273A JP 8683177 A JP8683177 A JP 8683177A JP 8683177 A JP8683177 A JP 8683177A JP S5421273 A JPS5421273 A JP S5421273A
Authority
JP
Japan
Prior art keywords
photo mask
film
manufacture
reflection
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8683177A
Other languages
Japanese (ja)
Inventor
Kyusaku Nishioka
Haruhiko Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8683177A priority Critical patent/JPS5421273A/en
Publication of JPS5421273A publication Critical patent/JPS5421273A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To establish a photo mask with excellent dimension accuracy, by using a Si3N4 film as the reflection prevention film, in forming photo shield film and reflection film on a transparent substrate with lamination.
COPYRIGHT: (C)1979,JPO&Japio
JP8683177A 1977-07-19 1977-07-19 Manufacture for photo mask Pending JPS5421273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8683177A JPS5421273A (en) 1977-07-19 1977-07-19 Manufacture for photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8683177A JPS5421273A (en) 1977-07-19 1977-07-19 Manufacture for photo mask

Publications (1)

Publication Number Publication Date
JPS5421273A true JPS5421273A (en) 1979-02-17

Family

ID=13897749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8683177A Pending JPS5421273A (en) 1977-07-19 1977-07-19 Manufacture for photo mask

Country Status (1)

Country Link
JP (1) JPS5421273A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831336A (en) * 1981-08-19 1983-02-24 Konishiroku Photo Ind Co Ltd Raw material of photomask
JPS61138257A (en) * 1984-12-10 1986-06-25 Toshiba Corp Mask substrate
JPS61138256A (en) * 1984-12-10 1986-06-25 Toshiba Corp Formation of mask pattern
JPS61235819A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Liquid crystal display element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831336A (en) * 1981-08-19 1983-02-24 Konishiroku Photo Ind Co Ltd Raw material of photomask
JPS61138257A (en) * 1984-12-10 1986-06-25 Toshiba Corp Mask substrate
JPS61138256A (en) * 1984-12-10 1986-06-25 Toshiba Corp Formation of mask pattern
JPS6339893B2 (en) * 1984-12-10 1988-08-08 Tokyo Shibaura Electric Co
JPS6339892B2 (en) * 1984-12-10 1988-08-08 Tokyo Shibaura Electric Co
JPS61235819A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Liquid crystal display element

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