JPS53134368A - Manufacture for photo mask - Google Patents

Manufacture for photo mask

Info

Publication number
JPS53134368A
JPS53134368A JP4958777A JP4958777A JPS53134368A JP S53134368 A JPS53134368 A JP S53134368A JP 4958777 A JP4958777 A JP 4958777A JP 4958777 A JP4958777 A JP 4958777A JP S53134368 A JPS53134368 A JP S53134368A
Authority
JP
Japan
Prior art keywords
photo mask
manufacture
prevnet
photodoped
calcogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4958777A
Other languages
Japanese (ja)
Other versions
JPS5822738B2 (en
Inventor
Katsuyuki Arii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP52049587A priority Critical patent/JPS5822738B2/en
Publication of JPS53134368A publication Critical patent/JPS53134368A/en
Publication of JPS5822738B2 publication Critical patent/JPS5822738B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevnet the lowering in pattern accuracy, by fixing Ag photodoped through the crystallization of calcogen glass film under photo mask 7.
COPYRIGHT: (C)1978,JPO&Japio
JP52049587A 1977-04-28 1977-04-28 How to make photo masks Expired JPS5822738B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52049587A JPS5822738B2 (en) 1977-04-28 1977-04-28 How to make photo masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52049587A JPS5822738B2 (en) 1977-04-28 1977-04-28 How to make photo masks

Publications (2)

Publication Number Publication Date
JPS53134368A true JPS53134368A (en) 1978-11-22
JPS5822738B2 JPS5822738B2 (en) 1983-05-11

Family

ID=12835345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52049587A Expired JPS5822738B2 (en) 1977-04-28 1977-04-28 How to make photo masks

Country Status (1)

Country Link
JP (1) JPS5822738B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099323A (en) * 1973-12-28 1975-08-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099323A (en) * 1973-12-28 1975-08-07

Also Published As

Publication number Publication date
JPS5822738B2 (en) 1983-05-11

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