JPS53134368A - Manufacture for photo mask - Google Patents
Manufacture for photo maskInfo
- Publication number
- JPS53134368A JPS53134368A JP4958777A JP4958777A JPS53134368A JP S53134368 A JPS53134368 A JP S53134368A JP 4958777 A JP4958777 A JP 4958777A JP 4958777 A JP4958777 A JP 4958777A JP S53134368 A JPS53134368 A JP S53134368A
- Authority
- JP
- Japan
- Prior art keywords
- photo mask
- manufacture
- prevnet
- photodoped
- calcogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To prevnet the lowering in pattern accuracy, by fixing Ag photodoped through the crystallization of calcogen glass film under photo mask 7.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52049587A JPS5822738B2 (en) | 1977-04-28 | 1977-04-28 | How to make photo masks |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52049587A JPS5822738B2 (en) | 1977-04-28 | 1977-04-28 | How to make photo masks |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53134368A true JPS53134368A (en) | 1978-11-22 |
JPS5822738B2 JPS5822738B2 (en) | 1983-05-11 |
Family
ID=12835345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52049587A Expired JPS5822738B2 (en) | 1977-04-28 | 1977-04-28 | How to make photo masks |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5822738B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5099323A (en) * | 1973-12-28 | 1975-08-07 |
-
1977
- 1977-04-28 JP JP52049587A patent/JPS5822738B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5099323A (en) * | 1973-12-28 | 1975-08-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS5822738B2 (en) | 1983-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5228875A (en) | Mask | |
JPS5397425A (en) | Silver halide color photographic material | |
JPS5396674A (en) | Photo mask | |
JPS5225576A (en) | Exposure method of photo-resist | |
JPS51124920A (en) | Method for preparing photographic light sensitive materials | |
JPS51126073A (en) | Pattern printing equpment made available by photo-etching method | |
JPS53134368A (en) | Manufacture for photo mask | |
JPS5431282A (en) | Pattern formation method | |
JPS51111073A (en) | Fine pattern forming | |
JPS52173A (en) | X-ray etching mask | |
JPS5421273A (en) | Manufacture for photo mask | |
JPS51115822A (en) | Silver halogenide photo emulsion for ruby laser exposure | |
JPS5431281A (en) | Optical exposure mask | |
JPS51151073A (en) | Method to adjust the position of an mask for an integrated circuit | |
JPS525270A (en) | Photo-mask | |
JPS5399772A (en) | Optical mask | |
JPS5360177A (en) | Photo mask | |
JPS52117569A (en) | Electronic beam exposure unit | |
JPS51136287A (en) | Photo mask using non-crystalline carchognide glass thin film | |
JPS51130192A (en) | The process of manufacture for illminative optical solid display sabst ace | |
JPS5351973A (en) | Photo mask | |
JPS52130280A (en) | Color receiving tube | |
JPS5354675A (en) | Positioning detecting method | |
JPS5227275A (en) | Glass mask holder | |
JPS51129140A (en) | Light pen |