JPS52117569A - Electronic beam exposure unit - Google Patents

Electronic beam exposure unit

Info

Publication number
JPS52117569A
JPS52117569A JP3417576A JP3417576A JPS52117569A JP S52117569 A JPS52117569 A JP S52117569A JP 3417576 A JP3417576 A JP 3417576A JP 3417576 A JP3417576 A JP 3417576A JP S52117569 A JPS52117569 A JP S52117569A
Authority
JP
Japan
Prior art keywords
electronic beam
exposure unit
beam exposure
electronic
pracision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3417576A
Other languages
Japanese (ja)
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3417576A priority Critical patent/JPS52117569A/en
Publication of JPS52117569A publication Critical patent/JPS52117569A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform ultra-pracision electronic beam process by having synchronous clock of system using the marker of wafer itself.
COPYRIGHT: (C)1977,JPO&Japio
JP3417576A 1976-03-30 1976-03-30 Electronic beam exposure unit Pending JPS52117569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3417576A JPS52117569A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3417576A JPS52117569A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Publications (1)

Publication Number Publication Date
JPS52117569A true JPS52117569A (en) 1977-10-03

Family

ID=12406859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3417576A Pending JPS52117569A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Country Status (1)

Country Link
JP (1) JPS52117569A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348677A (en) * 1976-10-15 1978-05-02 Fujitsu Ltd Electron beam exposure method
JP2002331623A (en) * 2001-05-08 2002-11-19 Asahi Kasei Corp Double-ply film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348677A (en) * 1976-10-15 1978-05-02 Fujitsu Ltd Electron beam exposure method
JPS5625016B2 (en) * 1976-10-15 1981-06-10
JP2002331623A (en) * 2001-05-08 2002-11-19 Asahi Kasei Corp Double-ply film

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