JPS52117569A - Electronic beam exposure unit - Google Patents
Electronic beam exposure unitInfo
- Publication number
- JPS52117569A JPS52117569A JP3417576A JP3417576A JPS52117569A JP S52117569 A JPS52117569 A JP S52117569A JP 3417576 A JP3417576 A JP 3417576A JP 3417576 A JP3417576 A JP 3417576A JP S52117569 A JPS52117569 A JP S52117569A
- Authority
- JP
- Japan
- Prior art keywords
- electronic beam
- exposure unit
- beam exposure
- electronic
- pracision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform ultra-pracision electronic beam process by having synchronous clock of system using the marker of wafer itself.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417576A JPS52117569A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417576A JPS52117569A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117569A true JPS52117569A (en) | 1977-10-03 |
Family
ID=12406859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3417576A Pending JPS52117569A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117569A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5348677A (en) * | 1976-10-15 | 1978-05-02 | Fujitsu Ltd | Electron beam exposure method |
JP2002331623A (en) * | 2001-05-08 | 2002-11-19 | Asahi Kasei Corp | Double-ply film |
-
1976
- 1976-03-30 JP JP3417576A patent/JPS52117569A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5348677A (en) * | 1976-10-15 | 1978-05-02 | Fujitsu Ltd | Electron beam exposure method |
JPS5625016B2 (en) * | 1976-10-15 | 1981-06-10 | ||
JP2002331623A (en) * | 2001-05-08 | 2002-11-19 | Asahi Kasei Corp | Double-ply film |
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