JPS5342678A - X-ray exposure method - Google Patents
X-ray exposure methodInfo
- Publication number
- JPS5342678A JPS5342678A JP11745676A JP11745676A JPS5342678A JP S5342678 A JPS5342678 A JP S5342678A JP 11745676 A JP11745676 A JP 11745676A JP 11745676 A JP11745676 A JP 11745676A JP S5342678 A JPS5342678 A JP S5342678A
- Authority
- JP
- Japan
- Prior art keywords
- exposure method
- ray exposure
- rays
- wafers
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To control the exposure of X-rays to wafers based on the X-rays having transmitted through the through-hole provided to the wafers.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11745676A JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11745676A JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5342678A true JPS5342678A (en) | 1978-04-18 |
JPS5343022B2 JPS5343022B2 (en) | 1978-11-16 |
Family
ID=14712104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11745676A Granted JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5342678A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399770A (en) * | 1977-02-10 | 1978-08-31 | Hitachi Ltd | Soft x-ray transfer mask |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959576A (en) * | 1972-06-29 | 1974-06-10 |
-
1976
- 1976-09-30 JP JP11745676A patent/JPS5342678A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959576A (en) * | 1972-06-29 | 1974-06-10 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399770A (en) * | 1977-02-10 | 1978-08-31 | Hitachi Ltd | Soft x-ray transfer mask |
Also Published As
Publication number | Publication date |
---|---|
JPS5343022B2 (en) | 1978-11-16 |
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