JPS52120761A - Exposure unit - Google Patents

Exposure unit

Info

Publication number
JPS52120761A
JPS52120761A JP3718376A JP3718376A JPS52120761A JP S52120761 A JPS52120761 A JP S52120761A JP 3718376 A JP3718376 A JP 3718376A JP 3718376 A JP3718376 A JP 3718376A JP S52120761 A JPS52120761 A JP S52120761A
Authority
JP
Japan
Prior art keywords
exposure unit
unit
incorporating
easy adjustment
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3718376A
Other languages
Japanese (ja)
Inventor
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3718376A priority Critical patent/JPS52120761A/en
Publication of JPS52120761A publication Critical patent/JPS52120761A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure easy adjustment of the unit by incorporating the standard sample into the unit or sample holder.
COPYRIGHT: (C)1977,JPO&Japio
JP3718376A 1976-04-05 1976-04-05 Exposure unit Pending JPS52120761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3718376A JPS52120761A (en) 1976-04-05 1976-04-05 Exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3718376A JPS52120761A (en) 1976-04-05 1976-04-05 Exposure unit

Publications (1)

Publication Number Publication Date
JPS52120761A true JPS52120761A (en) 1977-10-11

Family

ID=12490465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3718376A Pending JPS52120761A (en) 1976-04-05 1976-04-05 Exposure unit

Country Status (1)

Country Link
JP (1) JPS52120761A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163138A (en) * 1982-03-23 1983-09-27 Fujitsu Ltd Scanning type electron microscope
JP2005038641A (en) * 2003-07-16 2005-02-10 Jeol Ltd Charged particle beam device equipped with aberration control unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163138A (en) * 1982-03-23 1983-09-27 Fujitsu Ltd Scanning type electron microscope
JP2005038641A (en) * 2003-07-16 2005-02-10 Jeol Ltd Charged particle beam device equipped with aberration control unit

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