JPS5294776A - Illuminometer for photo resist - Google Patents

Illuminometer for photo resist

Info

Publication number
JPS5294776A
JPS5294776A JP1035576A JP1035576A JPS5294776A JP S5294776 A JPS5294776 A JP S5294776A JP 1035576 A JP1035576 A JP 1035576A JP 1035576 A JP1035576 A JP 1035576A JP S5294776 A JPS5294776 A JP S5294776A
Authority
JP
Japan
Prior art keywords
photo resist
illuminometer
luminosity
nonlocus
consideration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1035576A
Other languages
Japanese (ja)
Other versions
JPS5855658B2 (en
Inventor
Kanji Koname
Mamoru Nonaka
Minoru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1035576A priority Critical patent/JPS5855658B2/en
Publication of JPS5294776A publication Critical patent/JPS5294776A/en
Publication of JPS5855658B2 publication Critical patent/JPS5855658B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain accurate and practical average luminosity against photo resist by having time integration of luminosity taking the reciprocity law nonlocus property of photo resist into consideration.
COPYRIGHT: (C)1977,JPO&Japio
JP1035576A 1976-02-04 1976-02-04 Illuminance meter for photoresist Expired JPS5855658B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1035576A JPS5855658B2 (en) 1976-02-04 1976-02-04 Illuminance meter for photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1035576A JPS5855658B2 (en) 1976-02-04 1976-02-04 Illuminance meter for photoresist

Publications (2)

Publication Number Publication Date
JPS5294776A true JPS5294776A (en) 1977-08-09
JPS5855658B2 JPS5855658B2 (en) 1983-12-10

Family

ID=11747861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1035576A Expired JPS5855658B2 (en) 1976-02-04 1976-02-04 Illuminance meter for photoresist

Country Status (1)

Country Link
JP (1) JPS5855658B2 (en)

Also Published As

Publication number Publication date
JPS5855658B2 (en) 1983-12-10

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