JPS5294776A - Illuminometer for photo resist - Google Patents
Illuminometer for photo resistInfo
- Publication number
- JPS5294776A JPS5294776A JP1035576A JP1035576A JPS5294776A JP S5294776 A JPS5294776 A JP S5294776A JP 1035576 A JP1035576 A JP 1035576A JP 1035576 A JP1035576 A JP 1035576A JP S5294776 A JPS5294776 A JP S5294776A
- Authority
- JP
- Japan
- Prior art keywords
- photo resist
- illuminometer
- luminosity
- nonlocus
- consideration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To obtain accurate and practical average luminosity against photo resist by having time integration of luminosity taking the reciprocity law nonlocus property of photo resist into consideration.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1035576A JPS5855658B2 (en) | 1976-02-04 | 1976-02-04 | Illuminance meter for photoresist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1035576A JPS5855658B2 (en) | 1976-02-04 | 1976-02-04 | Illuminance meter for photoresist |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5294776A true JPS5294776A (en) | 1977-08-09 |
JPS5855658B2 JPS5855658B2 (en) | 1983-12-10 |
Family
ID=11747861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1035576A Expired JPS5855658B2 (en) | 1976-02-04 | 1976-02-04 | Illuminance meter for photoresist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855658B2 (en) |
-
1976
- 1976-02-04 JP JP1035576A patent/JPS5855658B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5855658B2 (en) | 1983-12-10 |
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