JPS5625016B2 - - Google Patents

Info

Publication number
JPS5625016B2
JPS5625016B2 JP12296376A JP12296376A JPS5625016B2 JP S5625016 B2 JPS5625016 B2 JP S5625016B2 JP 12296376 A JP12296376 A JP 12296376A JP 12296376 A JP12296376 A JP 12296376A JP S5625016 B2 JPS5625016 B2 JP S5625016B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12296376A
Other versions
JPS5348677A (en )
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

JP12296376A 1976-10-15 1976-10-15 Expired JPS5625016B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12296376A JPS5625016B2 (en) 1976-10-15 1976-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12296376A JPS5625016B2 (en) 1976-10-15 1976-10-15

Publications (2)

Publication Number Publication Date
JPS5348677A true JPS5348677A (en) 1978-05-02
JPS5625016B2 true JPS5625016B2 (en) 1981-06-10

Family

ID=14848943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12296376A Expired JPS5625016B2 (en) 1976-10-15 1976-10-15

Country Status (1)

Country Link
JP (1) JPS5625016B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548949A (en) * 1978-10-02 1980-04-08 Jones Geraint A C Scribing device and method
JPS5856419A (en) * 1981-09-30 1983-04-04 Fujitsu Ltd Electron beam exposure method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117569A (en) * 1976-03-30 1977-10-03 Toshiba Corp Electronic beam exposure unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117569A (en) * 1976-03-30 1977-10-03 Toshiba Corp Electronic beam exposure unit

Also Published As

Publication number Publication date Type
JPS5348677A (en) 1978-05-02 application

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