JPS5625016B2 - - Google Patents
Info
- Publication number
- JPS5625016B2 JPS5625016B2 JP12296376A JP12296376A JPS5625016B2 JP S5625016 B2 JPS5625016 B2 JP S5625016B2 JP 12296376 A JP12296376 A JP 12296376A JP 12296376 A JP12296376 A JP 12296376A JP S5625016 B2 JPS5625016 B2 JP S5625016B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12296376A JPS5348677A (en) | 1976-10-15 | 1976-10-15 | Electron beam exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12296376A JPS5348677A (en) | 1976-10-15 | 1976-10-15 | Electron beam exposure method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5348677A JPS5348677A (en) | 1978-05-02 |
| JPS5625016B2 true JPS5625016B2 (en) | 1981-06-10 |
Family
ID=14848943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12296376A Granted JPS5348677A (en) | 1976-10-15 | 1976-10-15 | Electron beam exposure method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5348677A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5548949A (en) * | 1978-10-02 | 1980-04-08 | Jones Geraint A C | Scribing device and method |
| JPS5856419A (en) * | 1981-09-30 | 1983-04-04 | Fujitsu Ltd | Electron beam exposure method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117569A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Electronic beam exposure unit |
-
1976
- 1976-10-15 JP JP12296376A patent/JPS5348677A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117569A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Electronic beam exposure unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5348677A (en) | 1978-05-02 |