JPS51136287A - Photo mask using non-crystalline carchognide glass thin film - Google Patents

Photo mask using non-crystalline carchognide glass thin film

Info

Publication number
JPS51136287A
JPS51136287A JP5956275A JP5956275A JPS51136287A JP S51136287 A JPS51136287 A JP S51136287A JP 5956275 A JP5956275 A JP 5956275A JP 5956275 A JP5956275 A JP 5956275A JP S51136287 A JPS51136287 A JP S51136287A
Authority
JP
Japan
Prior art keywords
crystalline
thin film
carchognide
photo mask
glass thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5956275A
Other languages
Japanese (ja)
Inventor
Haruo Nagai
Yoshio Toyoshima
Kunishige Oe
Osamu Ochi
Etsuo Noguchi
Sakae Maebotoke
Yasushi Utsuki
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5956275A priority Critical patent/JPS51136287A/en
Publication of JPS51136287A publication Critical patent/JPS51136287A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Simple, accurate and durable porduction process by the use of non-crystalline carchagenide thin film which has light sensitivity, mask pattern forming capability and adequate optical characteristics.
COPYRIGHT: (C)1976,JPO&Japio
JP5956275A 1975-05-21 1975-05-21 Photo mask using non-crystalline carchognide glass thin film Pending JPS51136287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5956275A JPS51136287A (en) 1975-05-21 1975-05-21 Photo mask using non-crystalline carchognide glass thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5956275A JPS51136287A (en) 1975-05-21 1975-05-21 Photo mask using non-crystalline carchognide glass thin film

Publications (1)

Publication Number Publication Date
JPS51136287A true JPS51136287A (en) 1976-11-25

Family

ID=13116795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5956275A Pending JPS51136287A (en) 1975-05-21 1975-05-21 Photo mask using non-crystalline carchognide glass thin film

Country Status (1)

Country Link
JP (1) JPS51136287A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355369U (en) * 1976-10-08 1978-05-12
WO1998052101A1 (en) * 1997-05-16 1998-11-19 Aerial Imaging Corporation Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4924367A (en) * 1972-06-28 1974-03-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4924367A (en) * 1972-06-28 1974-03-04

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355369U (en) * 1976-10-08 1978-05-12
JPS5648009Y2 (en) * 1976-10-08 1981-11-10
WO1998052101A1 (en) * 1997-05-16 1998-11-19 Aerial Imaging Corporation Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
US5998066A (en) * 1997-05-16 1999-12-07 Aerial Imaging Corporation Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

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