JPS51136287A - Photo mask using non-crystalline carchognide glass thin film - Google Patents
Photo mask using non-crystalline carchognide glass thin filmInfo
- Publication number
- JPS51136287A JPS51136287A JP5956275A JP5956275A JPS51136287A JP S51136287 A JPS51136287 A JP S51136287A JP 5956275 A JP5956275 A JP 5956275A JP 5956275 A JP5956275 A JP 5956275A JP S51136287 A JPS51136287 A JP S51136287A
- Authority
- JP
- Japan
- Prior art keywords
- crystalline
- thin film
- carchognide
- photo mask
- glass thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Simple, accurate and durable porduction process by the use of non-crystalline carchagenide thin film which has light sensitivity, mask pattern forming capability and adequate optical characteristics.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956275A JPS51136287A (en) | 1975-05-21 | 1975-05-21 | Photo mask using non-crystalline carchognide glass thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956275A JPS51136287A (en) | 1975-05-21 | 1975-05-21 | Photo mask using non-crystalline carchognide glass thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51136287A true JPS51136287A (en) | 1976-11-25 |
Family
ID=13116795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5956275A Pending JPS51136287A (en) | 1975-05-21 | 1975-05-21 | Photo mask using non-crystalline carchognide glass thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51136287A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5355369U (en) * | 1976-10-08 | 1978-05-12 | ||
WO1998052101A1 (en) * | 1997-05-16 | 1998-11-19 | Aerial Imaging Corporation | Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845302A (en) * | 1971-10-11 | 1973-06-28 | ||
JPS4924367A (en) * | 1972-06-28 | 1974-03-04 |
-
1975
- 1975-05-21 JP JP5956275A patent/JPS51136287A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845302A (en) * | 1971-10-11 | 1973-06-28 | ||
JPS4924367A (en) * | 1972-06-28 | 1974-03-04 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5355369U (en) * | 1976-10-08 | 1978-05-12 | ||
JPS5648009Y2 (en) * | 1976-10-08 | 1981-11-10 | ||
WO1998052101A1 (en) * | 1997-05-16 | 1998-11-19 | Aerial Imaging Corporation | Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
US5998066A (en) * | 1997-05-16 | 1999-12-07 | Aerial Imaging Corporation | Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
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