JPS51136286A - Ion implantation using noncrystalline carchogenide thin film as mask - Google Patents
Ion implantation using noncrystalline carchogenide thin film as maskInfo
- Publication number
- JPS51136286A JPS51136286A JP5956175A JP5956175A JPS51136286A JP S51136286 A JPS51136286 A JP S51136286A JP 5956175 A JP5956175 A JP 5956175A JP 5956175 A JP5956175 A JP 5956175A JP S51136286 A JPS51136286 A JP S51136286A
- Authority
- JP
- Japan
- Prior art keywords
- carchogenide
- thin film
- ion implantation
- noncrystalline
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Simplified, highly accurate and ion resistive mask forming process by using uncrystalline carchogenide glass thin film as mask forming material at selective ion implantation.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956175A JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956175A JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51136286A true JPS51136286A (en) | 1976-11-25 |
JPS557693B2 JPS557693B2 (en) | 1980-02-27 |
Family
ID=13116769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5956175A Granted JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51136286A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5355370U (en) * | 1976-10-08 | 1978-05-12 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0215903A (en) * | 1988-07-01 | 1990-01-19 | Matsushita Electric Ind Co Ltd | Machine tool |
JPH0253505A (en) * | 1988-08-17 | 1990-02-22 | Matsushita Electric Ind Co Ltd | Machining device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845302A (en) * | 1971-10-11 | 1973-06-28 | ||
JPS4924367A (en) * | 1972-06-28 | 1974-03-04 |
-
1975
- 1975-05-21 JP JP5956175A patent/JPS51136286A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845302A (en) * | 1971-10-11 | 1973-06-28 | ||
JPS4924367A (en) * | 1972-06-28 | 1974-03-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5355370U (en) * | 1976-10-08 | 1978-05-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS557693B2 (en) | 1980-02-27 |
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