JPS51136286A - Ion implantation using noncrystalline carchogenide thin film as mask - Google Patents

Ion implantation using noncrystalline carchogenide thin film as mask

Info

Publication number
JPS51136286A
JPS51136286A JP5956175A JP5956175A JPS51136286A JP S51136286 A JPS51136286 A JP S51136286A JP 5956175 A JP5956175 A JP 5956175A JP 5956175 A JP5956175 A JP 5956175A JP S51136286 A JPS51136286 A JP S51136286A
Authority
JP
Japan
Prior art keywords
carchogenide
thin film
ion implantation
noncrystalline
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5956175A
Other languages
Japanese (ja)
Other versions
JPS557693B2 (en
Inventor
Haruo Nagai
Yoshio Toyoshima
Kunishige Oe
Osamu Ochi
Etsuo Noguchi
Sakae Maebotoke
Yasushi Utsuki
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5956175A priority Critical patent/JPS51136286A/en
Publication of JPS51136286A publication Critical patent/JPS51136286A/en
Publication of JPS557693B2 publication Critical patent/JPS557693B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: Simplified, highly accurate and ion resistive mask forming process by using uncrystalline carchogenide glass thin film as mask forming material at selective ion implantation.
COPYRIGHT: (C)1976,JPO&Japio
JP5956175A 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask Granted JPS51136286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5956175A JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5956175A JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Publications (2)

Publication Number Publication Date
JPS51136286A true JPS51136286A (en) 1976-11-25
JPS557693B2 JPS557693B2 (en) 1980-02-27

Family

ID=13116769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5956175A Granted JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Country Status (1)

Country Link
JP (1) JPS51136286A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355370U (en) * 1976-10-08 1978-05-12

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215903A (en) * 1988-07-01 1990-01-19 Matsushita Electric Ind Co Ltd Machine tool
JPH0253505A (en) * 1988-08-17 1990-02-22 Matsushita Electric Ind Co Ltd Machining device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4924367A (en) * 1972-06-28 1974-03-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4924367A (en) * 1972-06-28 1974-03-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355370U (en) * 1976-10-08 1978-05-12

Also Published As

Publication number Publication date
JPS557693B2 (en) 1980-02-27

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