JPS51117569A - Sample drift correction device - Google Patents

Sample drift correction device

Info

Publication number
JPS51117569A
JPS51117569A JP50041340A JP4134075A JPS51117569A JP S51117569 A JPS51117569 A JP S51117569A JP 50041340 A JP50041340 A JP 50041340A JP 4134075 A JP4134075 A JP 4134075A JP S51117569 A JPS51117569 A JP S51117569A
Authority
JP
Japan
Prior art keywords
correction device
drift correction
sample drift
sample
drift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50041340A
Other languages
Japanese (ja)
Inventor
Masahide Okumura
Yasuo Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50041340A priority Critical patent/JPS51117569A/en
Publication of JPS51117569A publication Critical patent/JPS51117569A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To automatically sense the drift of a sample in regard to the original irradiation position of the charged particle beam and to correct the position of the sample.
COPYRIGHT: (C)1976,JPO&Japio
JP50041340A 1975-04-07 1975-04-07 Sample drift correction device Pending JPS51117569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50041340A JPS51117569A (en) 1975-04-07 1975-04-07 Sample drift correction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50041340A JPS51117569A (en) 1975-04-07 1975-04-07 Sample drift correction device

Publications (1)

Publication Number Publication Date
JPS51117569A true JPS51117569A (en) 1976-10-15

Family

ID=12605779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50041340A Pending JPS51117569A (en) 1975-04-07 1975-04-07 Sample drift correction device

Country Status (1)

Country Link
JP (1) JPS51117569A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121256A (en) * 1979-03-13 1980-09-18 Jeol Ltd Correcting method of drift in electron microscope
JPS55126849A (en) * 1979-03-23 1980-10-01 Jeol Ltd Analyzer
JPS6243050A (en) * 1985-08-19 1987-02-25 Toshiba Corp Method and device for controlling irradiation of electron beam on predetermined position

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121256A (en) * 1979-03-13 1980-09-18 Jeol Ltd Correcting method of drift in electron microscope
JPS6161221B2 (en) * 1979-03-13 1986-12-24 Nippon Electron Optics Lab
JPS55126849A (en) * 1979-03-23 1980-10-01 Jeol Ltd Analyzer
JPS633258B2 (en) * 1979-03-23 1988-01-22 Nippon Electron Optics Lab
JPS6243050A (en) * 1985-08-19 1987-02-25 Toshiba Corp Method and device for controlling irradiation of electron beam on predetermined position

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