JPS51117569A - Sample drift correction device - Google Patents
Sample drift correction deviceInfo
- Publication number
- JPS51117569A JPS51117569A JP50041340A JP4134075A JPS51117569A JP S51117569 A JPS51117569 A JP S51117569A JP 50041340 A JP50041340 A JP 50041340A JP 4134075 A JP4134075 A JP 4134075A JP S51117569 A JPS51117569 A JP S51117569A
- Authority
- JP
- Japan
- Prior art keywords
- correction device
- drift correction
- sample drift
- sample
- drift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To automatically sense the drift of a sample in regard to the original irradiation position of the charged particle beam and to correct the position of the sample.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50041340A JPS51117569A (en) | 1975-04-07 | 1975-04-07 | Sample drift correction device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50041340A JPS51117569A (en) | 1975-04-07 | 1975-04-07 | Sample drift correction device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51117569A true JPS51117569A (en) | 1976-10-15 |
Family
ID=12605779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50041340A Pending JPS51117569A (en) | 1975-04-07 | 1975-04-07 | Sample drift correction device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51117569A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55121256A (en) * | 1979-03-13 | 1980-09-18 | Jeol Ltd | Correcting method of drift in electron microscope |
JPS55126849A (en) * | 1979-03-23 | 1980-10-01 | Jeol Ltd | Analyzer |
JPS6243050A (en) * | 1985-08-19 | 1987-02-25 | Toshiba Corp | Method and device for controlling irradiation of electron beam on predetermined position |
-
1975
- 1975-04-07 JP JP50041340A patent/JPS51117569A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55121256A (en) * | 1979-03-13 | 1980-09-18 | Jeol Ltd | Correcting method of drift in electron microscope |
JPS6161221B2 (en) * | 1979-03-13 | 1986-12-24 | Nippon Electron Optics Lab | |
JPS55126849A (en) * | 1979-03-23 | 1980-10-01 | Jeol Ltd | Analyzer |
JPS633258B2 (en) * | 1979-03-23 | 1988-01-22 | Nippon Electron Optics Lab | |
JPS6243050A (en) * | 1985-08-19 | 1987-02-25 | Toshiba Corp | Method and device for controlling irradiation of electron beam on predetermined position |
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