JPS55126849A - Analyzer - Google Patents

Analyzer

Info

Publication number
JPS55126849A
JPS55126849A JP3391179A JP3391179A JPS55126849A JP S55126849 A JPS55126849 A JP S55126849A JP 3391179 A JP3391179 A JP 3391179A JP 3391179 A JP3391179 A JP 3391179A JP S55126849 A JPS55126849 A JP S55126849A
Authority
JP
Japan
Prior art keywords
drift
magnitude
sample
electron
deflectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3391179A
Other languages
Japanese (ja)
Other versions
JPS633258B2 (en
Inventor
Yoshihiro Hirata
Yoshiyasu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3391179A priority Critical patent/JPS55126849A/en
Publication of JPS55126849A publication Critical patent/JPS55126849A/en
Publication of JPS633258B2 publication Critical patent/JPS633258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

PURPOSE:To correct completely the drift of a sample by detecting the magnitude and direction of the drift of the sample and then by deflecting electron beams on the basis of the detection signal so as to let an electron-beam spot follow up the drift. CONSTITUTION:Time and coordinate signals obtained by light pen 18 are supplied to arithmetic and memory unit 19 to find the magnitude and direction of the drift of a sample. Arithmetic and memory unit 19 memorizes the magnitude and direction of the drift per unit time and then supplies them to controller 13. Controller 13 supplies electeic signals, corresponding to the magnitude and direction of the drift, to deflectors 7x and 7y by way of D-A converters 14x and 14y. Electron beam 2 radiated from electron gun 1 and that of a cathode ray tube are deflected by deflectors 7x and 7y corresponding to the magnitude and direction of the drift.
JP3391179A 1979-03-23 1979-03-23 Analyzer Granted JPS55126849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3391179A JPS55126849A (en) 1979-03-23 1979-03-23 Analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3391179A JPS55126849A (en) 1979-03-23 1979-03-23 Analyzer

Publications (2)

Publication Number Publication Date
JPS55126849A true JPS55126849A (en) 1980-10-01
JPS633258B2 JPS633258B2 (en) 1988-01-22

Family

ID=12399695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3391179A Granted JPS55126849A (en) 1979-03-23 1979-03-23 Analyzer

Country Status (1)

Country Link
JP (1) JPS55126849A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02181640A (en) * 1989-01-06 1990-07-16 Nec Corp Cathode luminescence device with high surface resolution
WO1995000835A1 (en) * 1993-06-23 1995-01-05 Research Development Corporation Of Japan Method and apparatus for adjusting electron-beam device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022098102A (en) 2020-12-21 2022-07-01 株式会社ヂーマグ Molten metal pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02181640A (en) * 1989-01-06 1990-07-16 Nec Corp Cathode luminescence device with high surface resolution
WO1995000835A1 (en) * 1993-06-23 1995-01-05 Research Development Corporation Of Japan Method and apparatus for adjusting electron-beam device

Also Published As

Publication number Publication date
JPS633258B2 (en) 1988-01-22

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