JPS529487A - Sample analyzer - Google Patents

Sample analyzer

Info

Publication number
JPS529487A
JPS529487A JP50085397A JP8539775A JPS529487A JP S529487 A JPS529487 A JP S529487A JP 50085397 A JP50085397 A JP 50085397A JP 8539775 A JP8539775 A JP 8539775A JP S529487 A JPS529487 A JP S529487A
Authority
JP
Japan
Prior art keywords
sample analyzer
sample
analyzed
emitted
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50085397A
Other languages
Japanese (ja)
Other versions
JPS5727576B2 (en
Inventor
Hiroshi Doi
Kuniyuki Sakumichi
Keizo Suzuki
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50085397A priority Critical patent/JPS529487A/en
Publication of JPS529487A publication Critical patent/JPS529487A/en
Publication of JPS5727576B2 publication Critical patent/JPS5727576B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Abstract

PURPOSE:To irradiate primary radiation particles such as an ion beam and electron beam to the surface of a sample while scanning it, and to correct secondary emission particle only which is emitted from the previously specified area on the sample surface as if correcting displacement of the part to be analyzed.
JP50085397A 1975-07-14 1975-07-14 Sample analyzer Granted JPS529487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50085397A JPS529487A (en) 1975-07-14 1975-07-14 Sample analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50085397A JPS529487A (en) 1975-07-14 1975-07-14 Sample analyzer

Publications (2)

Publication Number Publication Date
JPS529487A true JPS529487A (en) 1977-01-25
JPS5727576B2 JPS5727576B2 (en) 1982-06-11

Family

ID=13857627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50085397A Granted JPS529487A (en) 1975-07-14 1975-07-14 Sample analyzer

Country Status (1)

Country Link
JP (1) JPS529487A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224549A (en) * 1983-06-04 1984-12-17 Shimadzu Corp Mass spectrometer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0292174U (en) * 1989-01-10 1990-07-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224549A (en) * 1983-06-04 1984-12-17 Shimadzu Corp Mass spectrometer

Also Published As

Publication number Publication date
JPS5727576B2 (en) 1982-06-11

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