JPS5589738A - Auger electron photometry unit - Google Patents

Auger electron photometry unit

Info

Publication number
JPS5589738A
JPS5589738A JP16175978A JP16175978A JPS5589738A JP S5589738 A JPS5589738 A JP S5589738A JP 16175978 A JP16175978 A JP 16175978A JP 16175978 A JP16175978 A JP 16175978A JP S5589738 A JPS5589738 A JP S5589738A
Authority
JP
Japan
Prior art keywords
location
fed
electrons
signal
analyzed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16175978A
Other languages
Japanese (ja)
Other versions
JPS6233546B2 (en
Inventor
Yuji Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP16175978A priority Critical patent/JPS5589738A/en
Publication of JPS5589738A publication Critical patent/JPS5589738A/en
Publication of JPS6233546B2 publication Critical patent/JPS6233546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable to obtain the energy spectrum of correct Auger electrons only, by easily eliminating the background from the secondary electron spectrum emitted from the location of sample to be analyzed. CONSTITUTION:A signal is fed to the deflector 6 from external part and the switch 19 is switched at 18 t2 with this instruction simultaneously. Further, with the emission of primary electrons, the secondary electrons emitted from the location of the sample 5 to be analyzed are detected with the detector 12 via the analyzer 11, and the output signal is fed to the subtraction circuit 20. Next, external instruction is again fed to the deflector 6, and control is made so that the location irradiated with the primary electrons can be at the non-analysis location of the sample 5. Simultaneously, the switch 19 is switched at 18 t3 with this instruction. The secondary electrons from the nonanalysis position are fed to the gain control circuit 21 with the irradiation of primary electrons and the signal gain-controlled is fed to the subtraction circuit 20. The circuit 20 subtracts the signal from the location to be analyzed and that from nonanalysis location and feeds the subtraction to the XY recorder 14.
JP16175978A 1978-12-28 1978-12-28 Auger electron photometry unit Granted JPS5589738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16175978A JPS5589738A (en) 1978-12-28 1978-12-28 Auger electron photometry unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16175978A JPS5589738A (en) 1978-12-28 1978-12-28 Auger electron photometry unit

Publications (2)

Publication Number Publication Date
JPS5589738A true JPS5589738A (en) 1980-07-07
JPS6233546B2 JPS6233546B2 (en) 1987-07-21

Family

ID=15741345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16175978A Granted JPS5589738A (en) 1978-12-28 1978-12-28 Auger electron photometry unit

Country Status (1)

Country Link
JP (1) JPS5589738A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262040A (en) * 1989-03-31 1990-10-24 Jeol Ltd Automatic qualitative analysis method based on spectral data
JPH07183343A (en) * 1993-12-24 1995-07-21 Nec Corp X-ray photoelectric spectral analyzer
JP2011520126A (en) * 2008-05-08 2011-07-14 ケーエルエー−テンカー・コーポレーション In situ differential light method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262040A (en) * 1989-03-31 1990-10-24 Jeol Ltd Automatic qualitative analysis method based on spectral data
JPH07183343A (en) * 1993-12-24 1995-07-21 Nec Corp X-ray photoelectric spectral analyzer
JP2011520126A (en) * 2008-05-08 2011-07-14 ケーエルエー−テンカー・コーポレーション In situ differential light method

Also Published As

Publication number Publication date
JPS6233546B2 (en) 1987-07-21

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